Matches in SemOpenAlex for { <https://semopenalex.org/work/W2132036315> ?p ?o ?g. }
- W2132036315 endingPage "3044" @default.
- W2132036315 startingPage "3033" @default.
- W2132036315 abstract "Modern pulsed power technology has its roots in the late 1950s and early 1960s, and it was driven overwhelmingly by applications in national defense carried out by several countries, especially the U.S., U.K., Russia, and China. The following decades, particularly the early 1990s, witnessed an increased interest in compact systems with pulse repetition rate that could be used in nondefense applications such as treatment of material surfaces by plasma and beam interactions, treatment of pollutants, food sterilization, medical applications, etc. This spawned a new generation of pulsed power components (solid-state switches) that led to completely solid-state modulators. This paper describes how the pulsed power technology used originally in beam sources and cathodic arcs has converged to produce power sources for plasma-based ion implantation (PBII) and related technologies. The present state of the art is reviewed, and prospects for future advances are described, especially for PBII." @default.
- W2132036315 created "2016-06-24" @default.
- W2132036315 creator A5015212404 @default.
- W2132036315 creator A5027650806 @default.
- W2132036315 creator A5076744182 @default.
- W2132036315 date "2011-11-01" @default.
- W2132036315 modified "2023-10-14" @default.
- W2132036315 title "Advances in High-Voltage Modulators for Applications in Pulsed Power and Plasma-Based Ion Implantation" @default.
- W2132036315 cites W1508286333 @default.
- W2132036315 cites W1528535596 @default.
- W2132036315 cites W1599929868 @default.
- W2132036315 cites W1676195803 @default.
- W2132036315 cites W1964251751 @default.
- W2132036315 cites W1975146188 @default.
- W2132036315 cites W1983121400 @default.
- W2132036315 cites W1988339214 @default.
- W2132036315 cites W1991063335 @default.
- W2132036315 cites W1993306844 @default.
- W2132036315 cites W1997141015 @default.
- W2132036315 cites W1998707454 @default.
- W2132036315 cites W2007305243 @default.
- W2132036315 cites W2008404862 @default.
- W2132036315 cites W2009095534 @default.
- W2132036315 cites W2010463199 @default.
- W2132036315 cites W2014223202 @default.
- W2132036315 cites W2015152650 @default.
- W2132036315 cites W2024291972 @default.
- W2132036315 cites W2034802895 @default.
- W2132036315 cites W2049179518 @default.
- W2132036315 cites W2052573084 @default.
- W2132036315 cites W2053157647 @default.
- W2132036315 cites W2054356564 @default.
- W2132036315 cites W2054778339 @default.
- W2132036315 cites W2055671864 @default.
- W2132036315 cites W2057824943 @default.
- W2132036315 cites W2061924770 @default.
- W2132036315 cites W2065738848 @default.
- W2132036315 cites W2066819125 @default.
- W2132036315 cites W2067280285 @default.
- W2132036315 cites W2070660866 @default.
- W2132036315 cites W2075777207 @default.
- W2132036315 cites W2090976386 @default.
- W2132036315 cites W2092768016 @default.
- W2132036315 cites W2092916872 @default.
- W2132036315 cites W2103273572 @default.
- W2132036315 cites W2110884003 @default.
- W2132036315 cites W2112184998 @default.
- W2132036315 cites W2112584954 @default.
- W2132036315 cites W2115031448 @default.
- W2132036315 cites W2118692172 @default.
- W2132036315 cites W2124516779 @default.
- W2132036315 cites W2124799767 @default.
- W2132036315 cites W2124965797 @default.
- W2132036315 cites W2131133899 @default.
- W2132036315 cites W2133493361 @default.
- W2132036315 cites W2136959410 @default.
- W2132036315 cites W2145743991 @default.
- W2132036315 cites W2151585932 @default.
- W2132036315 cites W2153351499 @default.
- W2132036315 cites W2154936535 @default.
- W2132036315 cites W2159082119 @default.
- W2132036315 cites W2160768735 @default.
- W2132036315 cites W2163073457 @default.
- W2132036315 cites W2165973298 @default.
- W2132036315 cites W2166865705 @default.
- W2132036315 cites W2170532213 @default.
- W2132036315 cites W2171520999 @default.
- W2132036315 cites W2501253508 @default.
- W2132036315 cites W3139959859 @default.
- W2132036315 cites W3145665133 @default.
- W2132036315 cites W4229567210 @default.
- W2132036315 cites W4298330675 @default.
- W2132036315 doi "https://doi.org/10.1109/tps.2011.2157841" @default.
- W2132036315 hasPublicationYear "2011" @default.
- W2132036315 type Work @default.
- W2132036315 sameAs 2132036315 @default.
- W2132036315 citedByCount "29" @default.
- W2132036315 countsByYear W21320363152012 @default.
- W2132036315 countsByYear W21320363152013 @default.
- W2132036315 countsByYear W21320363152014 @default.
- W2132036315 countsByYear W21320363152015 @default.
- W2132036315 countsByYear W21320363152016 @default.
- W2132036315 countsByYear W21320363152018 @default.
- W2132036315 countsByYear W21320363152019 @default.
- W2132036315 countsByYear W21320363152020 @default.
- W2132036315 countsByYear W21320363152021 @default.
- W2132036315 crossrefType "journal-article" @default.
- W2132036315 hasAuthorship W2132036315A5015212404 @default.
- W2132036315 hasAuthorship W2132036315A5027650806 @default.
- W2132036315 hasAuthorship W2132036315A5076744182 @default.
- W2132036315 hasConcept C119599485 @default.
- W2132036315 hasConcept C120665830 @default.
- W2132036315 hasConcept C121332964 @default.
- W2132036315 hasConcept C127413603 @default.
- W2132036315 hasConcept C145148216 @default.
- W2132036315 hasConcept C165801399 @default.
- W2132036315 hasConcept C168834538 @default.
- W2132036315 hasConcept C171250308 @default.