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• W2132132023 startingPage "106110" @default.
• W2132132023 abstract "Conductive atomic force microscopy experiments on gate dielectrics in air, nitrogen, and UHV have been compared to evaluate the impact of the environment on topography and electrical measurements. In current images, an increase of the lateral resolution and a reduction of the conductivity were observed in N2 and, especially, in UHV (where current depends also on the contact force). Both effects were related to the reduction/elimination of the water layer between the tip and the sample in N2/UHV. Therefore, since current measurements are very sensitive to environmental conditions, these factors must be taken into consideration when comparisons between several experiments are performed." @default.
• W2132132023 created "2016-06-24" @default.
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• W2132132023 date "2010-10-01" @default.
• W2132132023 modified "2023-09-24" @default.
• W2132132023 title "Note: Electrical resolution during conductive atomic force microscopy measurements under different environmental conditions and contact forces" @default.
• W2132132023 cites W1971017082 @default.
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• W2132132023 doi "https://doi.org/10.1063/1.3491956" @default.
• W2132132023 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/21034138" @default.
• W2132132023 hasPublicationYear "2010" @default.
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