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- W2132233160 abstract "Optical actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, a PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. The characteristics of the PLZT film have been evaluated. PLZT film actuators have been fabricated by depositing ITO transparent electrode on the surface of the PLZT film. Those actuators have been driven by the ultraviolet light. Performance of the photoresponse drive actuators have been evaluated by measuring displacement, electric current and surface temperature." @default.
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- W2132233160 date "2010-12-01" @default.
- W2132233160 modified "2023-09-26" @default.
- W2132233160 title "PLZT film actuators deposited by a hydrothermal method" @default.
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- W2132233160 doi "https://doi.org/10.1109/robio.2010.5723566" @default.
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