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- W2132308499 abstract "The current distribution in electron beams shaped by using either Köhler or critical illumination of apertures has been determined experimentally. The experimental technique is to scan a square image across sharp edges of a Faraday cage aperture while the first and second differentials of the current are displayed on an oscilloscope. The measurements show that the type of illumination is not an important factor in determining the ultimate edge sharpness. All measurements were made with 20‐kV accelerating voltage and it was found that for a square of side 3.5 μm imaged at an angular aperture 3.7 mrad the current density edge deteriorated to about 0.7 μ at 3 μA for both types of illumination. Results of imaging a menu of variable shapes in resist are used to demonstrate uniform current density distribution in the shaped beam." @default.
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- W2132308499 date "1981-11-01" @default.
- W2132308499 modified "2023-09-26" @default.
- W2132308499 title "Current distribution in shaped e‐beams" @default.
- W2132308499 doi "https://doi.org/10.1116/1.571176" @default.
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