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- W2132319683 abstract "Adding N2 into Cl2-based plasma discharges during the etching of InP-based photonic crystal in ICP-RIE system is shown to produce smooth sidewalls through the passivation of the etched surfaces. Here we present that the addition of BCI3 into this discharge allows to produce smooth and also vertical profiles in InP-based PhC structures. Positive ion current densities have been measured to characterize the plasma, and provide a perspective to understand the etching mechanism. An one missing row (Wl) photonic crystal membrane-waveguide fabricated by CI2/N2/BCI3 gas mixture exhibits a low propagation losses value of 35 dB/cm while operating below the light line." @default.
- W2132319683 created "2016-06-24" @default.
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- W2132319683 date "2007-05-01" @default.
- W2132319683 modified "2023-10-04" @default.
- W2132319683 title "N2-Based ICP-RIE Etching for InP-Based Photonic Crystal Membranes" @default.
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- W2132319683 doi "https://doi.org/10.1109/iciprm.2007.381163" @default.
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