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• W2132420975 abstract "Sulfur was embedded in atomic-layer-deposited (ALD) HfO2 films grown on Ge substrate by annealing under H2S gas before and after HfO2 ALD. The chemical states of sulfur in the film were examined by S K-edge X-ray absorption spectroscopy. It was revealed that the valences of S-ions were mostly –2 at Ge/HfO2 interface (GeSx or HfO2–ySy to passivate the interface), while they were mostly +6 in HfO2 layers (sulfates; HfO2–z(SO4)z). The leakage current density in post-deposi-tion-treated film was lower than that in pre-deposition-treated one. This suggests that the passivation of defects in oxide layer by sulfate ions is more effective to lower the leakage current rather than the interface defect passivation by S2– ions. (© 2015 WILEY-VCH Verlag GmbH &Co. KGaA, Weinheim)" @default.
• W2132420975 created "2016-06-24" @default.
• W2132420975 creator A5008036043 @default.
• W2132420975 creator A5010950048 @default.
• W2132420975 creator A5025917520 @default.
• W2132420975 creator A5031062637 @default.
• W2132420975 creator A5076097064 @default.
• W2132420975 creator A5044285324 @default.
• W2132420975 date "2015-09-01" @default.
• W2132420975 modified "2023-10-17" @default.
• W2132420975 title "Nature of chemical states of sulfur embedded in atomic-layer-deposited HfO2film on Ge substrate for interface passivation" @default.
• W2132420975 cites W1632800215 @default.
• W2132420975 cites W1990900628 @default.
• W2132420975 cites W1994880295 @default.
• W2132420975 cites W2019936836 @default.
• W2132420975 cites W2021000452 @default.
• W2132420975 cites W2027877492 @default.
• W2132420975 cites W2028105083 @default.
• W2132420975 cites W2037834780 @default.
• W2132420975 cites W2054191380 @default.
• W2132420975 cites W2077053320 @default.
• W2132420975 cites W2077903923 @default.
• W2132420975 cites W2081705115 @default.
• W2132420975 cites W2086158686 @default.
• W2132420975 cites W2090226293 @default.
• W2132420975 cites W2099834391 @default.
• W2132420975 cites W2107799826 @default.
• W2132420975 cites W2165146103 @default.
• W2132420975 cites W2312839261 @default.
• W2132420975 cites W2548341909 @default.
• W2132420975 cites W270638123 @default.
• W2132420975 cites W561640032 @default.
• W2132420975 doi "https://doi.org/10.1002/pssr.201510237" @default.
• W2132420975 hasPublicationYear "2015" @default.
• W2132420975 type Work @default.
• W2132420975 sameAs 2132420975 @default.
• W2132420975 citedByCount "3" @default.
• W2132420975 countsByYear W21324209752016 @default.
• W2132420975 countsByYear W21324209752019 @default.
• W2132420975 countsByYear W21324209752023 @default.
• W2132420975 crossrefType "journal-article" @default.
• W2132420975 hasAuthorship W2132420975A5008036043 @default.
• W2132420975 hasAuthorship W2132420975A5010950048 @default.
• W2132420975 hasAuthorship W2132420975A5025917520 @default.
• W2132420975 hasAuthorship W2132420975A5031062637 @default.
• W2132420975 hasAuthorship W2132420975A5044285324 @default.
• W2132420975 hasAuthorship W2132420975A5076097064 @default.
• W2132420975 hasConcept C111368507 @default.
• W2132420975 hasConcept C113196181 @default.
• W2132420975 hasConcept C127313418 @default.
• W2132420975 hasConcept C127413603 @default.
• W2132420975 hasConcept C171250308 @default.
• W2132420975 hasConcept C178790620 @default.
• W2132420975 hasConcept C179104552 @default.
• W2132420975 hasConcept C185592680 @default.
• W2132420975 hasConcept C191897082 @default.
• W2132420975 hasConcept C192562407 @default.
• W2132420975 hasConcept C2777289219 @default.
• W2132420975 hasConcept C2777855556 @default.
• W2132420975 hasConcept C2779227376 @default.
• W2132420975 hasConcept C2779851234 @default.
• W2132420975 hasConcept C33574316 @default.
• W2132420975 hasConcept C36003996 @default.
• W2132420975 hasConcept C42360764 @default.
• W2132420975 hasConcept C518881349 @default.
• W2132420975 hasConcept C69544855 @default.
• W2132420975 hasConceptScore W2132420975C111368507 @default.
• W2132420975 hasConceptScore W2132420975C113196181 @default.
• W2132420975 hasConceptScore W2132420975C127313418 @default.
• W2132420975 hasConceptScore W2132420975C127413603 @default.
• W2132420975 hasConceptScore W2132420975C171250308 @default.
• W2132420975 hasConceptScore W2132420975C178790620 @default.
• W2132420975 hasConceptScore W2132420975C179104552 @default.
• W2132420975 hasConceptScore W2132420975C185592680 @default.
• W2132420975 hasConceptScore W2132420975C191897082 @default.
• W2132420975 hasConceptScore W2132420975C192562407 @default.
• W2132420975 hasConceptScore W2132420975C2777289219 @default.
• W2132420975 hasConceptScore W2132420975C2777855556 @default.
• W2132420975 hasConceptScore W2132420975C2779227376 @default.
• W2132420975 hasConceptScore W2132420975C2779851234 @default.
• W2132420975 hasConceptScore W2132420975C33574316 @default.
• W2132420975 hasConceptScore W2132420975C36003996 @default.
• W2132420975 hasConceptScore W2132420975C42360764 @default.
• W2132420975 hasConceptScore W2132420975C518881349 @default.
• W2132420975 hasConceptScore W2132420975C69544855 @default.
• W2132420975 hasLocation W21324209751 @default.
• W2132420975 hasOpenAccess W2132420975 @default.
• W2132420975 hasPrimaryLocation W21324209751 @default.
• W2132420975 hasRelatedWork W1493555753 @default.
• W2132420975 hasRelatedWork W1526737390 @default.
• W2132420975 hasRelatedWork W1954465437 @default.
• W2132420975 hasRelatedWork W1971067422 @default.
• W2132420975 hasRelatedWork W1978160641 @default.
• W2132420975 hasRelatedWork W2007346186 @default.
• W2132420975 hasRelatedWork W2009373253 @default.
• W2132420975 hasRelatedWork W2036810371 @default.
• W2132420975 hasRelatedWork W2074166993 @default.
• W2132420975 hasRelatedWork W2093637366 @default.
• W2132420975 hasRelatedWork W2095300241 @default.
• W2132420975 hasRelatedWork W2107778669 @default.

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