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• W2132672185 abstract "We developed a home-made Sample-Holder Unit used for 2D nano-positionning with millimeter traveling ranges. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an Atomic Force Microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized." @default.
• W2132672185 created "2016-06-24" @default.
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• W2132672185 date "2010-07-01" @default.
• W2132672185 modified "2023-09-27" @default.
• W2132672185 title "Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning with High Resolution" @default.
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• W2132672185 doi "https://doi.org/10.1109/sensordevices.2010.42" @default.
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