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• W2132946605 abstract "The diffusion mechanism of phosphorus into thermally grown films from phosphorus vapor has been investigated using secondary ion mass spectrometry, wet‐chemical spectrophotometric measurements, and x‐ray photoelectron spectroscopy. The diffusion coefficients of phosphorus in films were determined in the temperature range 1273 to 1373 K: where R is 8.31 J K−1 mol−1. The solubilities of phosphorus in films at 1373 K ranged between and in the partial pressure range 0.001 to 0.22 atm and were approximately proportional to the first power of the partial pressure. The x‐ray photoelectron spectra revealed the presence of phosphorous pentoxide and atomic silicon in films which underwent phosphorus diffusion. The mechanism for phosphorus diffusion in films is as follows: after dissolving into the interstitial site of in the form of , phosphorus is incorporated into the network of by exchanging its site with silicon in the lattice site and diffuses through the silicon lattice sites." @default.
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• W2132946605 date "1997-07-01" @default.
• W2132946605 modified "2023-10-06" @default.
• W2132946605 title "Diffusion Mechanism of Phosphorus from Phosphorous Vapor in Amorphous Silicon Dioxide Film Prepared by Thermal Oxidation" @default.
• W2132946605 doi "https://doi.org/10.1149/1.1837854" @default.
• W2132946605 hasPublicationYear "1997" @default.
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