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• W2133189786 abstract "This paper focuses on a tunable resonator fabricated using bulk and surface micro-machining techniques. The resonator consists of a silicon micro-machined metalized cavity coupled with a MEMS bridge capacitor for tunability purposes. The resonator is excited using coplanar waveguide lines to avoid losses from transitions and facilitate measurements. The unloaded quality factor of the device is about 150 depending on the MEMS varactor position and the simulated tuning range is 0.4 GHz (1.45%) at 27.8 GHz." @default.
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• W2133189786 date "2003-10-01" @default.
• W2133189786 modified "2023-09-26" @default.
• W2133189786 title "A Micromachined Tunable Cavity Resonator" @default.
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• W2133189786 doi "https://doi.org/10.1109/euma.2003.341043" @default.
• W2133189786 hasPublicationYear "2003" @default.
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