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- W2133233461 abstract "Laser processing of semiconductors offers the promise of fast turn around of custom chips. Already lasers are used for mask repair and as a heat source for some thermal processes at the wafer level. This paper describes the development of a machine for the purpose of customizing gate arrays by using a laser as a point source of heat to cause various thermal reactions at the semiconductor surface." @default.
- W2133233461 created "2016-06-24" @default.
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- W2133233461 date "1988-08-16" @default.
- W2133233461 modified "2023-09-23" @default.
- W2133233461 title "Laser Processing Of Semiconductors - A Production Machine" @default.
- W2133233461 doi "https://doi.org/10.1117/12.947396" @default.
- W2133233461 hasPublicationYear "1988" @default.
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