Matches in SemOpenAlex for { <https://semopenalex.org/work/W2133279204> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2133279204 endingPage "698" @default.
- W2133279204 startingPage "698" @default.
- W2133279204 abstract "The effect of post-metallisation annealing (PMA) on the effective fixed charge in thermally grown SiO2 on 6H-SiC has been systematically studied. It is found that under a carefully controlled and optimised PMA condition, it is possible to reduce the effective fixed charge density for both p-type and n-type samples. The study covers an annealing temperature range 400 – 600°C in forming gas (5% hydrogen in nitrogen) for both p-type and n-type 6H-SiC. The optimum annealing conditions are reported." @default.
- W2133279204 created "2016-06-24" @default.
- W2133279204 creator A5001662012 @default.
- W2133279204 creator A5010044441 @default.
- W2133279204 creator A5032102087 @default.
- W2133279204 creator A5046268816 @default.
- W2133279204 creator A5065971756 @default.
- W2133279204 creator A5074198538 @default.
- W2133279204 date "1998-01-01" @default.
- W2133279204 modified "2023-09-26" @default.
- W2133279204 title "Effect of PMA on effective fixed charge in thermally grown oxide on 6H-SiC" @default.
- W2133279204 cites W1488501388 @default.
- W2133279204 cites W1982798992 @default.
- W2133279204 cites W2037023858 @default.
- W2133279204 cites W2065971906 @default.
- W2133279204 doi "https://doi.org/10.1049/el:19980444" @default.
- W2133279204 hasPublicationYear "1998" @default.
- W2133279204 type Work @default.
- W2133279204 sameAs 2133279204 @default.
- W2133279204 citedByCount "2" @default.
- W2133279204 crossrefType "journal-article" @default.
- W2133279204 hasAuthorship W2133279204A5001662012 @default.
- W2133279204 hasAuthorship W2133279204A5010044441 @default.
- W2133279204 hasAuthorship W2133279204A5032102087 @default.
- W2133279204 hasAuthorship W2133279204A5046268816 @default.
- W2133279204 hasAuthorship W2133279204A5065971756 @default.
- W2133279204 hasAuthorship W2133279204A5074198538 @default.
- W2133279204 hasConcept C113196181 @default.
- W2133279204 hasConcept C121332964 @default.
- W2133279204 hasConcept C159467904 @default.
- W2133279204 hasConcept C159985019 @default.
- W2133279204 hasConcept C178790620 @default.
- W2133279204 hasConcept C185592680 @default.
- W2133279204 hasConcept C191897082 @default.
- W2133279204 hasConcept C192562407 @default.
- W2133279204 hasConcept C2777855556 @default.
- W2133279204 hasConcept C2779851234 @default.
- W2133279204 hasConcept C2984553159 @default.
- W2133279204 hasConcept C39353612 @default.
- W2133279204 hasConcept C43617362 @default.
- W2133279204 hasConcept C49040817 @default.
- W2133279204 hasConcept C512968161 @default.
- W2133279204 hasConcept C537208039 @default.
- W2133279204 hasConcept C97355855 @default.
- W2133279204 hasConceptScore W2133279204C113196181 @default.
- W2133279204 hasConceptScore W2133279204C121332964 @default.
- W2133279204 hasConceptScore W2133279204C159467904 @default.
- W2133279204 hasConceptScore W2133279204C159985019 @default.
- W2133279204 hasConceptScore W2133279204C178790620 @default.
- W2133279204 hasConceptScore W2133279204C185592680 @default.
- W2133279204 hasConceptScore W2133279204C191897082 @default.
- W2133279204 hasConceptScore W2133279204C192562407 @default.
- W2133279204 hasConceptScore W2133279204C2777855556 @default.
- W2133279204 hasConceptScore W2133279204C2779851234 @default.
- W2133279204 hasConceptScore W2133279204C2984553159 @default.
- W2133279204 hasConceptScore W2133279204C39353612 @default.
- W2133279204 hasConceptScore W2133279204C43617362 @default.
- W2133279204 hasConceptScore W2133279204C49040817 @default.
- W2133279204 hasConceptScore W2133279204C512968161 @default.
- W2133279204 hasConceptScore W2133279204C537208039 @default.
- W2133279204 hasConceptScore W2133279204C97355855 @default.
- W2133279204 hasIssue "7" @default.
- W2133279204 hasLocation W21332792041 @default.
- W2133279204 hasOpenAccess W2133279204 @default.
- W2133279204 hasPrimaryLocation W21332792041 @default.
- W2133279204 hasRelatedWork W1574811161 @default.
- W2133279204 hasRelatedWork W1972990362 @default.
- W2133279204 hasRelatedWork W2028349372 @default.
- W2133279204 hasRelatedWork W2069037159 @default.
- W2133279204 hasRelatedWork W2081241215 @default.
- W2133279204 hasRelatedWork W2148315813 @default.
- W2133279204 hasRelatedWork W2149554966 @default.
- W2133279204 hasRelatedWork W2952800510 @default.
- W2133279204 hasRelatedWork W3022626579 @default.
- W2133279204 hasRelatedWork W2528007297 @default.
- W2133279204 hasVolume "34" @default.
- W2133279204 isParatext "false" @default.
- W2133279204 isRetracted "false" @default.
- W2133279204 magId "2133279204" @default.
- W2133279204 workType "article" @default.