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- W2133402512 abstract "The uncertainties are investigated in estimating the optical parameters (thickness, d, and complex permittivity, ) of very thin films arising from the methodological error and the uncertainties in the measurable quantities (transmittance, T, front-side reflectance, R, and backside reflectance, R). A computer generated optical response of films with d < λ/30 (λ being the wavelength) and dispersion with real (1) and imaginary (2) parts of is used to estimate the errors in and d owing to the model approximation. A random noise with normal distribution (zero mean and variance equal to that of a high-performance spectrophotometer) is added to T, R and R in order to study the influence of the uncertainties of T, R and R on the calculated values of 1, 2 and d. It is shown that when 1, 2 and d are obtained simultaneously, the influence of the two factors is considerable. The accuracy of 1, 2 and d increases significantly when they are calculated in two steps, whereby the value of d is first calculated followed by calculation of 1 and 2." @default.
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- W2133402512 date "2008-05-01" @default.
- W2133402512 modified "2023-09-26" @default.
- W2133402512 title "Very thin films: influence of the reflectance and transmittance uncertainties on the estimation of the films optical parameters" @default.
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- W2133402512 doi "https://doi.org/10.1088/1742-6596/113/1/012019" @default.
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