Matches in SemOpenAlex for { <https://semopenalex.org/work/W2133668356> ?p ?o ?g. }
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- W2133668356 endingPage "323" @default.
- W2133668356 startingPage "320" @default.
- W2133668356 abstract "A photochemical etching system that allowed excimer-laser (193 nm) etching of various metals to be performed in an O2 atmosphere in the direct writing mode is described. Etch-rate measurements as a function of laser power and O2 partial pressure were obtained for a molybdenum rapid etching process, by the production of volatile metal oxides such as MoO3. Analysis of the etch rates revealed the influence of oxygen partial pressure. Surface morphology studies using Tencor profilometry were undertaken to determine the results of the etching process. Post processing chemical treatment of samples was used to aid removal of surface debris." @default.
- W2133668356 created "2016-06-24" @default.
- W2133668356 creator A5008555647 @default.
- W2133668356 creator A5031868049 @default.
- W2133668356 creator A5039147629 @default.
- W2133668356 creator A5041498959 @default.
- W2133668356 creator A5053964244 @default.
- W2133668356 date "2000-12-01" @default.
- W2133668356 modified "2023-10-18" @default.
- W2133668356 title "Excimer-laser induced chemical etching of transition metals" @default.
- W2133668356 cites W1984344967 @default.
- W2133668356 cites W1986817405 @default.
- W2133668356 cites W2079404825 @default.
- W2133668356 doi "https://doi.org/10.1016/s0169-4332(00)00775-3" @default.
- W2133668356 hasPublicationYear "2000" @default.
- W2133668356 type Work @default.
- W2133668356 sameAs 2133668356 @default.
- W2133668356 citedByCount "0" @default.
- W2133668356 crossrefType "journal-article" @default.
- W2133668356 hasAuthorship W2133668356A5008555647 @default.
- W2133668356 hasAuthorship W2133668356A5031868049 @default.
- W2133668356 hasAuthorship W2133668356A5039147629 @default.
- W2133668356 hasAuthorship W2133668356A5041498959 @default.
- W2133668356 hasAuthorship W2133668356A5053964244 @default.
- W2133668356 hasConcept C100460472 @default.
- W2133668356 hasConcept C107872376 @default.
- W2133668356 hasConcept C113196181 @default.
- W2133668356 hasConcept C120665830 @default.
- W2133668356 hasConcept C121332964 @default.
- W2133668356 hasConcept C1291036 @default.
- W2133668356 hasConcept C130472188 @default.
- W2133668356 hasConcept C171250308 @default.
- W2133668356 hasConcept C178790620 @default.
- W2133668356 hasConcept C185592680 @default.
- W2133668356 hasConcept C191897082 @default.
- W2133668356 hasConcept C192562407 @default.
- W2133668356 hasConcept C2779227376 @default.
- W2133668356 hasConcept C2780477314 @default.
- W2133668356 hasConcept C33220542 @default.
- W2133668356 hasConcept C520434653 @default.
- W2133668356 hasConcept C540031477 @default.
- W2133668356 hasConcept C544153396 @default.
- W2133668356 hasConcept C549387045 @default.
- W2133668356 hasConcept C68463220 @default.
- W2133668356 hasConcept C71039073 @default.
- W2133668356 hasConcept C79261456 @default.
- W2133668356 hasConceptScore W2133668356C100460472 @default.
- W2133668356 hasConceptScore W2133668356C107872376 @default.
- W2133668356 hasConceptScore W2133668356C113196181 @default.
- W2133668356 hasConceptScore W2133668356C120665830 @default.
- W2133668356 hasConceptScore W2133668356C121332964 @default.
- W2133668356 hasConceptScore W2133668356C1291036 @default.
- W2133668356 hasConceptScore W2133668356C130472188 @default.
- W2133668356 hasConceptScore W2133668356C171250308 @default.
- W2133668356 hasConceptScore W2133668356C178790620 @default.
- W2133668356 hasConceptScore W2133668356C185592680 @default.
- W2133668356 hasConceptScore W2133668356C191897082 @default.
- W2133668356 hasConceptScore W2133668356C192562407 @default.
- W2133668356 hasConceptScore W2133668356C2779227376 @default.
- W2133668356 hasConceptScore W2133668356C2780477314 @default.
- W2133668356 hasConceptScore W2133668356C33220542 @default.
- W2133668356 hasConceptScore W2133668356C520434653 @default.
- W2133668356 hasConceptScore W2133668356C540031477 @default.
- W2133668356 hasConceptScore W2133668356C544153396 @default.
- W2133668356 hasConceptScore W2133668356C549387045 @default.
- W2133668356 hasConceptScore W2133668356C68463220 @default.
- W2133668356 hasConceptScore W2133668356C71039073 @default.
- W2133668356 hasConceptScore W2133668356C79261456 @default.
- W2133668356 hasIssue "1-4" @default.
- W2133668356 hasLocation W21336683561 @default.
- W2133668356 hasOpenAccess W2133668356 @default.
- W2133668356 hasPrimaryLocation W21336683561 @default.
- W2133668356 hasRelatedWork W196679807 @default.
- W2133668356 hasRelatedWork W1993772312 @default.
- W2133668356 hasRelatedWork W2010544036 @default.
- W2133668356 hasRelatedWork W2052292904 @default.
- W2133668356 hasRelatedWork W2052794911 @default.
- W2133668356 hasRelatedWork W2086452145 @default.
- W2133668356 hasRelatedWork W2133939764 @default.
- W2133668356 hasRelatedWork W2356241119 @default.
- W2133668356 hasRelatedWork W2359035278 @default.
- W2133668356 hasRelatedWork W4321353335 @default.
- W2133668356 hasVolume "168" @default.
- W2133668356 isParatext "false" @default.
- W2133668356 isRetracted "false" @default.
- W2133668356 magId "2133668356" @default.
- W2133668356 workType "article" @default.