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- W2133749315 abstract "A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the microscale was achieved with an hydraulic amplification mechanism that amplified (40×-50×) the limited stroke of the piezoelectric material into a significantly larger motion of a micromachined valve membrane with attached valve cap. These design features enabled the valve to meet simultaneously a set of high frequency (/spl ges/1 kHz), high pressure(/spl ges/300 kPa), and large stroke (20-30 μm) requirements not previously satisfied by other hydraulic flow regulation microvalves. This paper details the design, modeling, fabrication, assembly, and experimental characterization of this valve device. Fabrication challenges are detailed." @default.
- W2133749315 created "2016-06-24" @default.
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- W2133749315 date "2003-02-01" @default.
- W2133749315 modified "2023-10-18" @default.
- W2133749315 title "A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems" @default.
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- W2133749315 doi "https://doi.org/10.1109/jmems.2002.807471" @default.
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