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- W213407161 abstract "We have investigated atomic diffusion properties near the amorphous/crystalline $(a/c)$ Si(001) interface during solid-phase epitaxy (SPE) of Si based on molecular-dynamics simulations using the Tersoff potential. It has been found that the mean-square displacement of the Si atoms in an amorphous layer with a thickness of 10 AA{} at the $a/c$ interface is larger than that in bulk amorphous Si. This can be attributed to local heating due to crystallization of amorphous Si during SPE growth." @default.
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- W213407161 date "2001-05-11" @default.
- W213407161 modified "2023-09-24" @default.
- W213407161 title "Reply to “Comment on ‘Molecular-dynamics simulations of solid-phase epitaxy of Si: Growth mechanisms’ ”" @default.
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- W213407161 doi "https://doi.org/10.1103/physrevb.63.237402" @default.
- W213407161 hasPublicationYear "2001" @default.
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