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- W2134263706 abstract "CMP has been applied to SOI mesa isolation, with good results. Electrical leakage is comparable to that seen on mesa sidewall isolated structures, and there is no indication of contamination or mechanical damage to the transistors. In addition to the individual transistor data, we measured fully operational inverter chains having 640 stages. The yield of these inverter chains is comparable to that of sidewall isolated structures. This is further indication of the viability of the CMP planarization process at isolation. Further work is needed to optimize CMP conditions for isolation, but all indications to date are that it is a viable process for planarization." @default.
- W2134263706 created "2016-06-24" @default.
- W2134263706 creator A5002791512 @default.
- W2134263706 creator A5007006383 @default.
- W2134263706 creator A5021442387 @default.
- W2134263706 creator A5024444961 @default.
- W2134263706 date "2002-11-19" @default.
- W2134263706 modified "2023-09-25" @default.
- W2134263706 title "Novel mesa isolation using CMP for planarization of 0.35/0.25 um SOI" @default.
- W2134263706 doi "https://doi.org/10.1109/soi.1995.526485" @default.
- W2134263706 hasPublicationYear "2002" @default.
- W2134263706 type Work @default.
- W2134263706 sameAs 2134263706 @default.
- W2134263706 citedByCount "1" @default.
- W2134263706 crossrefType "proceedings-article" @default.
- W2134263706 hasAuthorship W2134263706A5002791512 @default.
- W2134263706 hasAuthorship W2134263706A5007006383 @default.
- W2134263706 hasAuthorship W2134263706A5021442387 @default.
- W2134263706 hasAuthorship W2134263706A5024444961 @default.
- W2134263706 hasConcept C105066941 @default.
- W2134263706 hasConcept C11190779 @default.
- W2134263706 hasConcept C119599485 @default.
- W2134263706 hasConcept C127413603 @default.
- W2134263706 hasConcept C139719470 @default.
- W2134263706 hasConcept C155310634 @default.
- W2134263706 hasConcept C162324750 @default.
- W2134263706 hasConcept C165801399 @default.
- W2134263706 hasConcept C171250308 @default.
- W2134263706 hasConcept C172385210 @default.
- W2134263706 hasConcept C180088628 @default.
- W2134263706 hasConcept C192562407 @default.
- W2134263706 hasConcept C199360897 @default.
- W2134263706 hasConcept C24326235 @default.
- W2134263706 hasConcept C2775941552 @default.
- W2134263706 hasConcept C2777042071 @default.
- W2134263706 hasConcept C2779227376 @default.
- W2134263706 hasConcept C2780940541 @default.
- W2134263706 hasConcept C41008148 @default.
- W2134263706 hasConcept C49040817 @default.
- W2134263706 hasConcept C53143962 @default.
- W2134263706 hasConcept C544956773 @default.
- W2134263706 hasConcept C60644358 @default.
- W2134263706 hasConcept C86803240 @default.
- W2134263706 hasConceptScore W2134263706C105066941 @default.
- W2134263706 hasConceptScore W2134263706C11190779 @default.
- W2134263706 hasConceptScore W2134263706C119599485 @default.
- W2134263706 hasConceptScore W2134263706C127413603 @default.
- W2134263706 hasConceptScore W2134263706C139719470 @default.
- W2134263706 hasConceptScore W2134263706C155310634 @default.
- W2134263706 hasConceptScore W2134263706C162324750 @default.
- W2134263706 hasConceptScore W2134263706C165801399 @default.
- W2134263706 hasConceptScore W2134263706C171250308 @default.
- W2134263706 hasConceptScore W2134263706C172385210 @default.
- W2134263706 hasConceptScore W2134263706C180088628 @default.
- W2134263706 hasConceptScore W2134263706C192562407 @default.
- W2134263706 hasConceptScore W2134263706C199360897 @default.
- W2134263706 hasConceptScore W2134263706C24326235 @default.
- W2134263706 hasConceptScore W2134263706C2775941552 @default.
- W2134263706 hasConceptScore W2134263706C2777042071 @default.
- W2134263706 hasConceptScore W2134263706C2779227376 @default.
- W2134263706 hasConceptScore W2134263706C2780940541 @default.
- W2134263706 hasConceptScore W2134263706C41008148 @default.
- W2134263706 hasConceptScore W2134263706C49040817 @default.
- W2134263706 hasConceptScore W2134263706C53143962 @default.
- W2134263706 hasConceptScore W2134263706C544956773 @default.
- W2134263706 hasConceptScore W2134263706C60644358 @default.
- W2134263706 hasConceptScore W2134263706C86803240 @default.
- W2134263706 hasLocation W21342637061 @default.
- W2134263706 hasOpenAccess W2134263706 @default.
- W2134263706 hasPrimaryLocation W21342637061 @default.
- W2134263706 hasRelatedWork W1589453140 @default.
- W2134263706 hasRelatedWork W1988257325 @default.
- W2134263706 hasRelatedWork W2032824931 @default.
- W2134263706 hasRelatedWork W2054106429 @default.
- W2134263706 hasRelatedWork W2092217952 @default.
- W2134263706 hasRelatedWork W2098571191 @default.
- W2134263706 hasRelatedWork W2157442085 @default.
- W2134263706 hasRelatedWork W2186769067 @default.
- W2134263706 hasRelatedWork W2281830009 @default.
- W2134263706 hasRelatedWork W2378967433 @default.
- W2134263706 hasRelatedWork W2595839868 @default.
- W2134263706 hasRelatedWork W2599286670 @default.
- W2134263706 hasRelatedWork W291719740 @default.
- W2134263706 hasRelatedWork W1676431704 @default.
- W2134263706 hasRelatedWork W2248333975 @default.
- W2134263706 hasRelatedWork W2400943698 @default.
- W2134263706 hasRelatedWork W2838095566 @default.
- W2134263706 hasRelatedWork W2859701259 @default.
- W2134263706 hasRelatedWork W3104001796 @default.
- W2134263706 hasRelatedWork W3140052479 @default.
- W2134263706 isParatext "false" @default.
- W2134263706 isRetracted "false" @default.
- W2134263706 magId "2134263706" @default.
- W2134263706 workType "article" @default.