Matches in SemOpenAlex for { <https://semopenalex.org/work/W2134336719> ?p ?o ?g. }
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- W2134336719 endingPage "1186" @default.
- W2134336719 startingPage "1180" @default.
- W2134336719 abstract "The individual and synergistic effects of benzotriazole and sodium dodecyl sulfonate on copper disc are investigated at a down pressure of 3.4 kpa. The corrosion rate is reduced by using benzotriazole, but the surface quality is poor owing to the slow formation rate of copper–benzotriazole protection film. For sodium dodecyl sulfonate, the corrosion rate is further reduced, but slight corrosions can be still observed due to the incomplete coverage of sodium dodecyl sulfonate molecules. The combination of sodium dodecyl sulfonate and benzotriazole leads to the maximum decrease of corrosion rate. Under the benzotriazole/sodium dodecyl sulfonate ratio of 1:3, the average roughness achieves as low as 1.025 nm owing to the soft and dense coverage of benzotriazole/sodium dodecyl sulfonate molecules. Besides, the trends of removal rate, roughness and friction coefficient are proved to be similar for copper discs and copper wafers in slurries with different inhibitors. Therefore, the results presented here are relevant for further developments in the area of low-pressure chemical mechanical planarization of copper lines overlying fragile low-k dielectrics in the new interconnect structures." @default.
- W2134336719 created "2016-06-24" @default.
- W2134336719 creator A5001916271 @default.
- W2134336719 creator A5065408318 @default.
- W2134336719 creator A5080207299 @default.
- W2134336719 creator A5090453104 @default.
- W2134336719 creator A5091911967 @default.
- W2134336719 date "2014-06-05" @default.
- W2134336719 modified "2023-09-23" @default.
- W2134336719 title "Effects of mixed inhibitors in copper chemical mechanical polishing at a low down pressure" @default.
- W2134336719 cites W1964592862 @default.
- W2134336719 cites W1966199269 @default.
- W2134336719 cites W1974999209 @default.
- W2134336719 cites W1975458642 @default.
- W2134336719 cites W1978324474 @default.
- W2134336719 cites W1978447456 @default.
- W2134336719 cites W1980947923 @default.
- W2134336719 cites W1982937072 @default.
- W2134336719 cites W1987577362 @default.
- W2134336719 cites W1990498951 @default.
- W2134336719 cites W2000250693 @default.
- W2134336719 cites W2004774327 @default.
- W2134336719 cites W2021469109 @default.
- W2134336719 cites W2028702750 @default.
- W2134336719 cites W2033320697 @default.
- W2134336719 cites W2040472280 @default.
- W2134336719 cites W2046474228 @default.
- W2134336719 cites W2056298884 @default.
- W2134336719 cites W2063719830 @default.
- W2134336719 cites W2068658566 @default.
- W2134336719 cites W2068689443 @default.
- W2134336719 cites W2074911016 @default.
- W2134336719 cites W2075557184 @default.
- W2134336719 cites W2078111637 @default.
- W2134336719 cites W2105750536 @default.
- W2134336719 cites W2130447612 @default.
- W2134336719 cites W2155644462 @default.
- W2134336719 cites W2165665270 @default.
- W2134336719 cites W2171406351 @default.
- W2134336719 doi "https://doi.org/10.1177/1350650114538614" @default.
- W2134336719 hasPublicationYear "2014" @default.
- W2134336719 type Work @default.
- W2134336719 sameAs 2134336719 @default.
- W2134336719 citedByCount "6" @default.
- W2134336719 countsByYear W21343367192015 @default.
- W2134336719 countsByYear W21343367192016 @default.
- W2134336719 countsByYear W21343367192019 @default.
- W2134336719 countsByYear W21343367192021 @default.
- W2134336719 countsByYear W21343367192023 @default.
- W2134336719 crossrefType "journal-article" @default.
- W2134336719 hasAuthorship W2134336719A5001916271 @default.
- W2134336719 hasAuthorship W2134336719A5065408318 @default.
- W2134336719 hasAuthorship W2134336719A5080207299 @default.
- W2134336719 hasAuthorship W2134336719A5090453104 @default.
- W2134336719 hasAuthorship W2134336719A5091911967 @default.
- W2134336719 hasConcept C178790620 @default.
- W2134336719 hasConcept C179104552 @default.
- W2134336719 hasConcept C180088628 @default.
- W2134336719 hasConcept C185592680 @default.
- W2134336719 hasConcept C20625102 @default.
- W2134336719 hasConcept C2777145204 @default.
- W2134336719 hasConcept C2777844968 @default.
- W2134336719 hasConcept C2778894819 @default.
- W2134336719 hasConcept C2779227376 @default.
- W2134336719 hasConcept C32909587 @default.
- W2134336719 hasConcept C537181965 @default.
- W2134336719 hasConcept C544778455 @default.
- W2134336719 hasConceptScore W2134336719C178790620 @default.
- W2134336719 hasConceptScore W2134336719C179104552 @default.
- W2134336719 hasConceptScore W2134336719C180088628 @default.
- W2134336719 hasConceptScore W2134336719C185592680 @default.
- W2134336719 hasConceptScore W2134336719C20625102 @default.
- W2134336719 hasConceptScore W2134336719C2777145204 @default.
- W2134336719 hasConceptScore W2134336719C2777844968 @default.
- W2134336719 hasConceptScore W2134336719C2778894819 @default.
- W2134336719 hasConceptScore W2134336719C2779227376 @default.
- W2134336719 hasConceptScore W2134336719C32909587 @default.
- W2134336719 hasConceptScore W2134336719C537181965 @default.
- W2134336719 hasConceptScore W2134336719C544778455 @default.
- W2134336719 hasIssue "10" @default.
- W2134336719 hasLocation W21343367191 @default.
- W2134336719 hasOpenAccess W2134336719 @default.
- W2134336719 hasPrimaryLocation W21343367191 @default.
- W2134336719 hasRelatedWork W1970674409 @default.
- W2134336719 hasRelatedWork W1996006049 @default.
- W2134336719 hasRelatedWork W2075797221 @default.
- W2134336719 hasRelatedWork W2134336719 @default.
- W2134336719 hasRelatedWork W2327798007 @default.
- W2134336719 hasRelatedWork W2349144012 @default.
- W2134336719 hasRelatedWork W2389547652 @default.
- W2134336719 hasRelatedWork W2530654309 @default.
- W2134336719 hasRelatedWork W2885135015 @default.
- W2134336719 hasRelatedWork W2952380907 @default.
- W2134336719 hasVolume "228" @default.
- W2134336719 isParatext "false" @default.
- W2134336719 isRetracted "false" @default.
- W2134336719 magId "2134336719" @default.
- W2134336719 workType "article" @default.