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- W2134490905 abstract "The scanned field performance of probe forming systems has been investigated leading to various methods for increasing the current that may be delivered into an electron probe scanning a square field of 104 lines. Programs for evaluating the third-order aberrations of both lenses and single and double deflection systems have been developed. These have been used to evaluate the performance of a typical pre-lens double deflection probe forming system. It is shown that it is possible to produce much better performance using post-lens deflection coils. Distortion, field curvature and astigmatism can be eliminated, using suitable electronics for dynamic correction, and the remaining third-order aberrations may be reduced by careful design of the deflection coils." @default.
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- W2134490905 date "1973-11-01" @default.
- W2134490905 modified "2023-10-09" @default.
- W2134490905 title "Aberration Correction for Increased Lines per Field in Scanning Electron Beam Technology" @default.
- W2134490905 doi "https://doi.org/10.1116/1.1318532" @default.
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