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- W2134609510 abstract "Abstract The dependence of the sputtering yield and efficiency on the angle of incidence has been calculated using exact methods for treating half-space problems. The yield is found to increase with angle of incidence and to pass through a maximum value around 80°–85°. The efficiency increases monotonically with angle of incidence and does not exhibit a maximum except at 90°. The results which are for self-sputtering and employ hard-sphere scattering agree qualitatively with experimental results." @default.
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- W2134609510 date "1981-01-01" @default.
- W2134609510 modified "2023-10-18" @default.
- W2134609510 title "“The intensity of sputtered atoms from a half-space and its dependence on the angle of incidence”" @default.
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- W2134609510 doi "https://doi.org/10.1080/01422448008218675" @default.
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