Matches in SemOpenAlex for { <https://semopenalex.org/work/W2135400430> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2135400430 endingPage "206" @default.
- W2135400430 startingPage "199" @default.
- W2135400430 abstract "Reactive ion etching is a widely-used technique for fabricating via holes in polymer-metal multilayer interconnect structures. Reactive ion etching of thin film polymers was studied using Benzocyclobutene polymer and photoresist etch mask, in O/sub 2/ and SF/sub 6/ plasma. A design of experiments (DOE) was carried out with rf power, pressure, and SF/sub 6/ concentration as the design variables, with a constant total gas flow rate. The responses measured in this study were dc bias, etch rate, via angle, uniformity, selectivity, lateral etch rate, and etch cleanliness. The DOE revealed some complex relationships between variables. DC bias was a very important parameter for explaining the observed effects on etch rate, via angle, selectivity, and lateral etching. A simple model was formulated to explain the dependence of via angle on design variables. The etching characteristics of the photoresist mask affected not only the selectivity, but also the via angle and lateral etch rate. Due to conflicting requirements posed by the responses, optimization of the reactive ion etch (RIE) process involves many trade-offs which depend on the particular application." @default.
- W2135400430 created "2016-06-24" @default.
- W2135400430 creator A5021118076 @default.
- W2135400430 date "1997-07-01" @default.
- W2135400430 modified "2023-10-14" @default.
- W2135400430 title "Reactive ion etching of benzocyclobutene polymer films" @default.
- W2135400430 cites W2055460019 @default.
- W2135400430 cites W2125144330 @default.
- W2135400430 doi "https://doi.org/10.1109/3476.649441" @default.
- W2135400430 hasPublicationYear "1997" @default.
- W2135400430 type Work @default.
- W2135400430 sameAs 2135400430 @default.
- W2135400430 citedByCount "33" @default.
- W2135400430 countsByYear W21354004302012 @default.
- W2135400430 countsByYear W21354004302013 @default.
- W2135400430 countsByYear W21354004302014 @default.
- W2135400430 countsByYear W21354004302016 @default.
- W2135400430 countsByYear W21354004302019 @default.
- W2135400430 crossrefType "journal-article" @default.
- W2135400430 hasAuthorship W2135400430A5021118076 @default.
- W2135400430 hasConcept C100460472 @default.
- W2135400430 hasConcept C107187091 @default.
- W2135400430 hasConcept C113196181 @default.
- W2135400430 hasConcept C118792377 @default.
- W2135400430 hasConcept C130472188 @default.
- W2135400430 hasConcept C134406635 @default.
- W2135400430 hasConcept C159985019 @default.
- W2135400430 hasConcept C161790260 @default.
- W2135400430 hasConcept C171250308 @default.
- W2135400430 hasConcept C178790620 @default.
- W2135400430 hasConcept C185592680 @default.
- W2135400430 hasConcept C192562407 @default.
- W2135400430 hasConcept C2776366733 @default.
- W2135400430 hasConcept C2779227376 @default.
- W2135400430 hasConcept C43617362 @default.
- W2135400430 hasConcept C49040817 @default.
- W2135400430 hasConcept C521977710 @default.
- W2135400430 hasConceptScore W2135400430C100460472 @default.
- W2135400430 hasConceptScore W2135400430C107187091 @default.
- W2135400430 hasConceptScore W2135400430C113196181 @default.
- W2135400430 hasConceptScore W2135400430C118792377 @default.
- W2135400430 hasConceptScore W2135400430C130472188 @default.
- W2135400430 hasConceptScore W2135400430C134406635 @default.
- W2135400430 hasConceptScore W2135400430C159985019 @default.
- W2135400430 hasConceptScore W2135400430C161790260 @default.
- W2135400430 hasConceptScore W2135400430C171250308 @default.
- W2135400430 hasConceptScore W2135400430C178790620 @default.
- W2135400430 hasConceptScore W2135400430C185592680 @default.
- W2135400430 hasConceptScore W2135400430C192562407 @default.
- W2135400430 hasConceptScore W2135400430C2776366733 @default.
- W2135400430 hasConceptScore W2135400430C2779227376 @default.
- W2135400430 hasConceptScore W2135400430C43617362 @default.
- W2135400430 hasConceptScore W2135400430C49040817 @default.
- W2135400430 hasConceptScore W2135400430C521977710 @default.
- W2135400430 hasIssue "3" @default.
- W2135400430 hasLocation W21354004301 @default.
- W2135400430 hasOpenAccess W2135400430 @default.
- W2135400430 hasPrimaryLocation W21354004301 @default.
- W2135400430 hasRelatedWork W196679807 @default.
- W2135400430 hasRelatedWork W1989758562 @default.
- W2135400430 hasRelatedWork W2054727160 @default.
- W2135400430 hasRelatedWork W2058723642 @default.
- W2135400430 hasRelatedWork W2061110363 @default.
- W2135400430 hasRelatedWork W2076322396 @default.
- W2135400430 hasRelatedWork W2120993127 @default.
- W2135400430 hasRelatedWork W2135400430 @default.
- W2135400430 hasRelatedWork W2478414193 @default.
- W2135400430 hasRelatedWork W2536147042 @default.
- W2135400430 hasVolume "20" @default.
- W2135400430 isParatext "false" @default.
- W2135400430 isRetracted "false" @default.
- W2135400430 magId "2135400430" @default.
- W2135400430 workType "article" @default.