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- W2135677500 abstract "A thermal mass air flow sensor (MAFS), which consists of a micro-heater and thermo-resistive sensors on the silicon-nitride (Si₃N₄) thin membrane structure, is micro-fabricated by MEMS processes. Two thermo-resistive temperature sensors are located at 100㎛ upstream and downstream from the micro-heater respectively. The thermal characteristics are measured to find the best measurement indicator. The micro-heater is operated under constant power condition, and four flow indicators are investigated. The normalized temperature indicator shows good physical meaning and is easy to use in practice. It is found that the configurations and heating power of thermal-resistive elements are the dominant factors to determine the range of the flow measurement in the MAFS with higher sensitivity and accuracy." @default.
- W2135677500 created "2016-06-24" @default.
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- W2135677500 date "2008-07-01" @default.
- W2135677500 modified "2023-09-26" @default.
- W2135677500 title "Micro-Fabrication and Thermal Characteristics of a Thermal Mass Air Flow Sensor for Real-time Applications" @default.
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- W2135677500 doi "https://doi.org/10.3795/ksme-b.2008.32.7.542" @default.
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