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- W2135815635 abstract "Electrothermally-actuated MEMS mirrors with large apertures of 6 mm and 10 mm are reported. Optical scan above 10°, divergence below 0.53 mrad and resonance frequencies in the order of 100 Hz have been achieved." @default.
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- W2135815635 date "2009-01-01" @default.
- W2135815635 modified "2023-09-22" @default.
- W2135815635 title "Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications" @default.
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- W2135815635 doi "https://doi.org/10.1109/omems.2009.5338553" @default.
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