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- W2135889799 abstract "Ag film. 5,12 In this paper, we present a new Ag/La bilayer metallization scheme for p-GaN ohmic contacts. By employing Ag/La ohmic contacts, light reflectance, thermal stability, and surface morphology of the contacts are improved significantly. The effects of the La overlayer on electrical and optical properties of Ag contacts will be discussed. Experimental The 1 m-thick Mg-doped GaN films used in this study were grown on c-plane sapphire substrates using metallorganic chemical vapor deposition MOCVD. The carrier concentration determined by Hall measurements is about 3 10 17 cm 3 . Prior to lithographic patterning process, the as-grown GaN samples were ultrasonically degreased using acetone and methanol, and then rinsed in deionized water. The circular transfer length method CTLM patterns were defined by standard photolithography for specific contact resistance measurements. The CTLM pattern has a constant outer radius of 200 m and the gap spacing between the inner and outer pads is varied from 5 to 45 m. Before placing into the deposition chamber for metallization, all samples were dipped into a buffer oxide etch BOE solution for 20 min in order to remove the surface oxide layer. Ag/La 150/20 nm bilayer contact patterns were deposited in sequence on the p-type GaN by electron-beam evaporation followed by the lift-off process. For comparison, a Ag 150 nm film was also deposited on the p-type GaN as a reference. The CTLM contacts were then annealed at temperatures ranging from 200 to 550°C for 1 min in air ambient using a rapid thermal annealing system. Current‐voltage I-V characteristics of the contacts were examined using a semiconductor parameter analyzer HP 4145 .AU V/Vis/ NIR spectrometer JASCO V-670 was used to measure the reflectance of the Ag and Ag/La metal contact schemes deposited on quartz glass." @default.
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- W2135889799 date "2011-01-01" @default.
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- W2135889799 title "Highly Reflective Ag∕La Bilayer Ohmic Contacts to p-Type GaN" @default.
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- W2135889799 doi "https://doi.org/10.1149/1.3533673" @default.
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