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- W2136107129 abstract "A piezoresistive pressure sensor with multilayer SOI structures has been developed. First SOI layers were employed as an etch-stop layer. Double-heteroepitaxially grown second SOI layers were used as an electrically isolated strain gauge. This sensor has the advantages of high sensitivity and high temperature operation." @default.
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- W2136107129 date "1990-01-01" @default.
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- W2136107129 title "Novel pressure sensors with multilayer SOI structures" @default.
- W2136107129 doi "https://doi.org/10.1049/el:19900506" @default.
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