Matches in SemOpenAlex for { <https://semopenalex.org/work/W2136215162> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2136215162 abstract "The model proposed integrates process parameters including pressure and velocity and other important input parameters including the wafer hardness, pad roughness, abrasive size, and abrasive geometry into the formulation to predict the material removal rate. Based on the deformation of hyper-elastic asperities attached to a linear-elastic pad, contact mechanism between the asperities and the wafer is analyzed. Micro-contact mechanism between the particle and wafer is proposed on the basis of elastic-plastic deformation theory. Material removal rate of single abrasive particle is calculated by the abrasive wear theory. The fluid effect in the current model is attributed to the number of active abrasives. Wafer scale material removal rate is analyzed in detail, which is agreed with the experimental results. The Preston’s coefficient, which has been determined empirically, is now given as a function of various processing variables, pad roughness, wafer material properties and slurry status." @default.
- W2136215162 created "2016-06-24" @default.
- W2136215162 creator A5008102102 @default.
- W2136215162 creator A5020971606 @default.
- W2136215162 creator A5052315821 @default.
- W2136215162 creator A5067504901 @default.
- W2136215162 date "2011-04-01" @default.
- W2136215162 modified "2023-09-27" @default.
- W2136215162 title "A Material Removal Modeling of Chemical Mechanical Polishing Based on Micro-Contact Mechanism" @default.
- W2136215162 cites W2027558267 @default.
- W2136215162 cites W2031132570 @default.
- W2136215162 cites W2046026222 @default.
- W2136215162 cites W2073433607 @default.
- W2136215162 cites W2086483556 @default.
- W2136215162 cites W2103239205 @default.
- W2136215162 cites W2157455258 @default.
- W2136215162 doi "https://doi.org/10.4028/www.scientific.net/kem.474-476.472" @default.
- W2136215162 hasPublicationYear "2011" @default.
- W2136215162 type Work @default.
- W2136215162 sameAs 2136215162 @default.
- W2136215162 citedByCount "0" @default.
- W2136215162 crossrefType "journal-article" @default.
- W2136215162 hasAuthorship W2136215162A5008102102 @default.
- W2136215162 hasAuthorship W2136215162A5020971606 @default.
- W2136215162 hasAuthorship W2136215162A5052315821 @default.
- W2136215162 hasAuthorship W2136215162A5067504901 @default.
- W2136215162 hasConcept C107365816 @default.
- W2136215162 hasConcept C111368507 @default.
- W2136215162 hasConcept C127313418 @default.
- W2136215162 hasConcept C127413603 @default.
- W2136215162 hasConcept C135628077 @default.
- W2136215162 hasConcept C138113353 @default.
- W2136215162 hasConcept C159985019 @default.
- W2136215162 hasConcept C160671074 @default.
- W2136215162 hasConcept C171250308 @default.
- W2136215162 hasConcept C179909247 @default.
- W2136215162 hasConcept C180088628 @default.
- W2136215162 hasConcept C192562407 @default.
- W2136215162 hasConcept C204366326 @default.
- W2136215162 hasConcept C2778517922 @default.
- W2136215162 hasConcept C2780957350 @default.
- W2136215162 hasConcept C66938386 @default.
- W2136215162 hasConcept C71039073 @default.
- W2136215162 hasConcept C94293008 @default.
- W2136215162 hasConceptScore W2136215162C107365816 @default.
- W2136215162 hasConceptScore W2136215162C111368507 @default.
- W2136215162 hasConceptScore W2136215162C127313418 @default.
- W2136215162 hasConceptScore W2136215162C127413603 @default.
- W2136215162 hasConceptScore W2136215162C135628077 @default.
- W2136215162 hasConceptScore W2136215162C138113353 @default.
- W2136215162 hasConceptScore W2136215162C159985019 @default.
- W2136215162 hasConceptScore W2136215162C160671074 @default.
- W2136215162 hasConceptScore W2136215162C171250308 @default.
- W2136215162 hasConceptScore W2136215162C179909247 @default.
- W2136215162 hasConceptScore W2136215162C180088628 @default.
- W2136215162 hasConceptScore W2136215162C192562407 @default.
- W2136215162 hasConceptScore W2136215162C204366326 @default.
- W2136215162 hasConceptScore W2136215162C2778517922 @default.
- W2136215162 hasConceptScore W2136215162C2780957350 @default.
- W2136215162 hasConceptScore W2136215162C66938386 @default.
- W2136215162 hasConceptScore W2136215162C71039073 @default.
- W2136215162 hasConceptScore W2136215162C94293008 @default.
- W2136215162 hasLocation W21362151621 @default.
- W2136215162 hasOpenAccess W2136215162 @default.
- W2136215162 hasPrimaryLocation W21362151621 @default.
- W2136215162 hasRelatedWork W1973902547 @default.
- W2136215162 hasRelatedWork W1981890265 @default.
- W2136215162 hasRelatedWork W1994058601 @default.
- W2136215162 hasRelatedWork W2059475168 @default.
- W2136215162 hasRelatedWork W2061704631 @default.
- W2136215162 hasRelatedWork W2071122615 @default.
- W2136215162 hasRelatedWork W2075398095 @default.
- W2136215162 hasRelatedWork W2077390848 @default.
- W2136215162 hasRelatedWork W2087604267 @default.
- W2136215162 hasRelatedWork W2103239205 @default.
- W2136215162 hasRelatedWork W2123684204 @default.
- W2136215162 hasRelatedWork W2126867932 @default.
- W2136215162 hasRelatedWork W2129492640 @default.
- W2136215162 hasRelatedWork W2386460284 @default.
- W2136215162 hasRelatedWork W2440599411 @default.
- W2136215162 hasRelatedWork W2516549975 @default.
- W2136215162 hasRelatedWork W2800440282 @default.
- W2136215162 hasRelatedWork W1968976749 @default.
- W2136215162 hasRelatedWork W2755639735 @default.
- W2136215162 hasRelatedWork W3152464704 @default.
- W2136215162 isParatext "false" @default.
- W2136215162 isRetracted "false" @default.
- W2136215162 magId "2136215162" @default.
- W2136215162 workType "article" @default.