FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2136291016> ?p ?o ?g. }

• W2136291016 endingPage "857" @default.
• W2136291016 startingPage "851" @default.
• W2136291016 abstract "Because the chemical states of the elements in SrTiO3 thin film on Si are reduced by argon ion beam bombardment, it was impossible to sputter depth profile the chemical states of SrTiO3 thin film by argon ion beams. In this paper, it is reported that the undistorted chemical states of Ti and Si at the SrTiO3/Si interface can be determined with oxygen ion beams at the appropriate 70° angle of incidence, with which either metallic Ti is not oxidized or Ti in SrTiO3 is not reduced. Under the sputter depth profiling conditions, the chemical state of Ti at the SrTiO3/Si interface could be successfully characterized and the effects of post-annealing at high temperature on the chemical state of Ti were studied. A significant number of Ti atoms in the metallic state were observed at the SrTiO3/Si interface without any post-annealing but all of them were oxidized to the Ti4+ chemical state after 2 h post-annealing at the temperatures above 600°C under oxygen flow. The dielectric properties of SrTiO3 thin films on Si were well correlated to the oxidation state of Ti and the broadening of the interface SiO2 layer induced by post-annealing at high temperature." @default.
• W2136291016 created "2016-06-24" @default.
• W2136291016 creator A5011934424 @default.
• W2136291016 creator A5025798142 @default.
• W2136291016 creator A5047739908 @default.
• W2136291016 creator A5049454031 @default.
• W2136291016 creator A5066186555 @default.
• W2136291016 date "1995-12-01" @default.
• W2136291016 modified "2023-10-16" @default.
• W2136291016 title "XPS sputter depth profiling of the chemical states for SrTiO3/Si interface by O2+ ion beams" @default.
• W2136291016 cites W1964422250 @default.
• W2136291016 cites W1965707039 @default.
• W2136291016 cites W1972521324 @default.
• W2136291016 cites W1975868821 @default.
• W2136291016 cites W1977407462 @default.
• W2136291016 cites W1992977482 @default.
• W2136291016 cites W1996804600 @default.
• W2136291016 cites W1997632772 @default.
• W2136291016 cites W2000044400 @default.
• W2136291016 cites W2011114965 @default.
• W2136291016 cites W2026122389 @default.
• W2136291016 cites W2035185980 @default.
• W2136291016 cites W2038473518 @default.
• W2136291016 cites W2050696129 @default.
• W2136291016 cites W2064067009 @default.
• W2136291016 cites W2074296519 @default.
• W2136291016 cites W2078141146 @default.
• W2136291016 cites W2087009975 @default.
• W2136291016 cites W2090471537 @default.
• W2136291016 cites W2273886880 @default.
• W2136291016 cites W2319836654 @default.
• W2136291016 doi "https://doi.org/10.1002/sia.740231302" @default.
• W2136291016 hasPublicationYear "1995" @default.
• W2136291016 type Work @default.
• W2136291016 sameAs 2136291016 @default.
• W2136291016 citedByCount "12" @default.
• W2136291016 countsByYear W21362910162012 @default.
• W2136291016 countsByYear W21362910162013 @default.
• W2136291016 countsByYear W21362910162019 @default.
• W2136291016 countsByYear W21362910162022 @default.
• W2136291016 crossrefType "journal-article" @default.
• W2136291016 hasAuthorship W2136291016A5011934424 @default.
• W2136291016 hasAuthorship W2136291016A5025798142 @default.
• W2136291016 hasAuthorship W2136291016A5047739908 @default.
• W2136291016 hasAuthorship W2136291016A5049454031 @default.
• W2136291016 hasAuthorship W2136291016A5066186555 @default.
• W2136291016 hasConcept C102404424 @default.
• W2136291016 hasConcept C113196181 @default.
• W2136291016 hasConcept C127413603 @default.
• W2136291016 hasConcept C145148216 @default.
• W2136291016 hasConcept C171250308 @default.
• W2136291016 hasConcept C175708663 @default.
• W2136291016 hasConcept C178790620 @default.
• W2136291016 hasConcept C185592680 @default.
• W2136291016 hasConcept C19067145 @default.
• W2136291016 hasConcept C191897082 @default.
• W2136291016 hasConcept C192562407 @default.
• W2136291016 hasConcept C22423302 @default.
• W2136291016 hasConcept C2777855556 @default.
• W2136291016 hasConcept C42360764 @default.
• W2136291016 hasConcept C43617362 @default.
• W2136291016 hasConcept C49040817 @default.
• W2136291016 hasConcept C50774322 @default.
• W2136291016 hasConcept C540031477 @default.
• W2136291016 hasConcept C544153396 @default.
• W2136291016 hasConcept C544956773 @default.
• W2136291016 hasConcept C547737533 @default.
• W2136291016 hasConceptScore W2136291016C102404424 @default.
• W2136291016 hasConceptScore W2136291016C113196181 @default.
• W2136291016 hasConceptScore W2136291016C127413603 @default.
• W2136291016 hasConceptScore W2136291016C145148216 @default.
• W2136291016 hasConceptScore W2136291016C171250308 @default.
• W2136291016 hasConceptScore W2136291016C175708663 @default.
• W2136291016 hasConceptScore W2136291016C178790620 @default.
• W2136291016 hasConceptScore W2136291016C185592680 @default.
• W2136291016 hasConceptScore W2136291016C19067145 @default.
• W2136291016 hasConceptScore W2136291016C191897082 @default.
• W2136291016 hasConceptScore W2136291016C192562407 @default.
• W2136291016 hasConceptScore W2136291016C22423302 @default.
• W2136291016 hasConceptScore W2136291016C2777855556 @default.
• W2136291016 hasConceptScore W2136291016C42360764 @default.
• W2136291016 hasConceptScore W2136291016C43617362 @default.
• W2136291016 hasConceptScore W2136291016C49040817 @default.
• W2136291016 hasConceptScore W2136291016C50774322 @default.
• W2136291016 hasConceptScore W2136291016C540031477 @default.
• W2136291016 hasConceptScore W2136291016C544153396 @default.
• W2136291016 hasConceptScore W2136291016C544956773 @default.
• W2136291016 hasConceptScore W2136291016C547737533 @default.
• W2136291016 hasIssue "13" @default.
• W2136291016 hasLocation W21362910161 @default.
• W2136291016 hasOpenAccess W2136291016 @default.
• W2136291016 hasPrimaryLocation W21362910161 @default.
• W2136291016 hasRelatedWork W1998651824 @default.
• W2136291016 hasRelatedWork W2004933194 @default.
• W2136291016 hasRelatedWork W2009943819 @default.
• W2136291016 hasRelatedWork W2036724309 @default.
• W2136291016 hasRelatedWork W2038363336 @default.
• W2136291016 hasRelatedWork W2080075196 @default.

• next