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- W2136449339 abstract "Self assembling mono layers are used to fabricate a humidity repellent and acid-proof film for transducer surface passivation. This protection can be used for silicon containing surfaces, like SiO/sub 2/ or Si/sub 3/N/sub 4/, as well as for aluminium. Etching tests with aggressive acids have shown a more than tenfold higher etching time for 110 nm aluminium layers in the case of protected surfaces. The hydrophobic characteristics are used in a gas sensor to prevent the unintentional ionic drift by surface currents. Stable operation of the gas sensors in environmental condition with r.h. up to 95% is possible." @default.
- W2136449339 created "2016-06-24" @default.
- W2136449339 creator A5001167141 @default.
- W2136449339 creator A5027850062 @default.
- W2136449339 creator A5055234677 @default.
- W2136449339 creator A5068744734 @default.
- W2136449339 date "2005-08-24" @default.
- W2136449339 modified "2023-10-06" @default.
- W2136449339 title "A humidity repellent and acid-proof self-assembling passivation for gas sensors and transducers with open surfaces" @default.
- W2136449339 cites W1600043080 @default.
- W2136449339 cites W2024592675 @default.
- W2136449339 doi "https://doi.org/10.1109/sensor.2005.1497343" @default.
- W2136449339 hasPublicationYear "2005" @default.
- W2136449339 type Work @default.
- W2136449339 sameAs 2136449339 @default.
- W2136449339 citedByCount "1" @default.
- W2136449339 countsByYear W21364493392023 @default.
- W2136449339 crossrefType "proceedings-article" @default.
- W2136449339 hasAuthorship W2136449339A5001167141 @default.
- W2136449339 hasAuthorship W2136449339A5027850062 @default.
- W2136449339 hasAuthorship W2136449339A5055234677 @default.
- W2136449339 hasAuthorship W2136449339A5068744734 @default.
- W2136449339 hasConcept C100460472 @default.
- W2136449339 hasConcept C119599485 @default.
- W2136449339 hasConcept C121332964 @default.
- W2136449339 hasConcept C127413603 @default.
- W2136449339 hasConcept C151420433 @default.
- W2136449339 hasConcept C159985019 @default.
- W2136449339 hasConcept C171250308 @default.
- W2136449339 hasConcept C192562407 @default.
- W2136449339 hasConcept C2779227376 @default.
- W2136449339 hasConcept C33220542 @default.
- W2136449339 hasConcept C33574316 @default.
- W2136449339 hasConcept C42360764 @default.
- W2136449339 hasConcept C49040817 @default.
- W2136449339 hasConcept C513153333 @default.
- W2136449339 hasConcept C544956773 @default.
- W2136449339 hasConcept C56318395 @default.
- W2136449339 hasConcept C97355855 @default.
- W2136449339 hasConceptScore W2136449339C100460472 @default.
- W2136449339 hasConceptScore W2136449339C119599485 @default.
- W2136449339 hasConceptScore W2136449339C121332964 @default.
- W2136449339 hasConceptScore W2136449339C127413603 @default.
- W2136449339 hasConceptScore W2136449339C151420433 @default.
- W2136449339 hasConceptScore W2136449339C159985019 @default.
- W2136449339 hasConceptScore W2136449339C171250308 @default.
- W2136449339 hasConceptScore W2136449339C192562407 @default.
- W2136449339 hasConceptScore W2136449339C2779227376 @default.
- W2136449339 hasConceptScore W2136449339C33220542 @default.
- W2136449339 hasConceptScore W2136449339C33574316 @default.
- W2136449339 hasConceptScore W2136449339C42360764 @default.
- W2136449339 hasConceptScore W2136449339C49040817 @default.
- W2136449339 hasConceptScore W2136449339C513153333 @default.
- W2136449339 hasConceptScore W2136449339C544956773 @default.
- W2136449339 hasConceptScore W2136449339C56318395 @default.
- W2136449339 hasConceptScore W2136449339C97355855 @default.
- W2136449339 hasLocation W21364493391 @default.
- W2136449339 hasOpenAccess W2136449339 @default.
- W2136449339 hasPrimaryLocation W21364493391 @default.
- W2136449339 hasRelatedWork W1481426311 @default.
- W2136449339 hasRelatedWork W1828176458 @default.
- W2136449339 hasRelatedWork W1967627355 @default.
- W2136449339 hasRelatedWork W2001792619 @default.
- W2136449339 hasRelatedWork W2003493611 @default.
- W2136449339 hasRelatedWork W2015976304 @default.
- W2136449339 hasRelatedWork W2172199185 @default.
- W2136449339 hasRelatedWork W2338840401 @default.
- W2136449339 hasRelatedWork W365740973 @default.
- W2136449339 hasRelatedWork W4381745617 @default.
- W2136449339 isParatext "false" @default.
- W2136449339 isRetracted "false" @default.
- W2136449339 magId "2136449339" @default.
- W2136449339 workType "article" @default.