Matches in SemOpenAlex for { <https://semopenalex.org/work/W2136475700> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2136475700 abstract "The study of OPC (Optical Proximity Correction) model that well predict the wafer result has beenresearched. As the pattern design shrink down, the need for the CD (Critical Dimension) controllabilityincreased more than before. To achieve these requirements, OPC models must be accurate for full chipprocess and model inaccuracies are one of several factors which contribute to errors in the final wafer image.For that reason, robust OPC using real lithographic terms was proposed. Real lithographic system is quitedifferent from ideal system that is used for OPC modeling. Until now, this difference was acceptable sincepattern size used for OPC model was large, but as device size shrinks, this gap between ideal and real systemcauses degradation of OPC accuracy. So, various optical parameters such as apodization, laser band width,degree of polarization, illumination are used today in order to compensate for this issue. Especially, majorissue in modeling error is related to how the illumination source is used. For this study we assess accuracy of optical model for robust OPC using ideal and actual illuminationsources, and test conditions are as follows: 1) We examined the difference of pupil types to output model respectively; 2) A parameterized test pattern layout was used by 1D test pattern types that have various lines and spaces; 3) All models were calculated in automation method so as to exclude the dependency of user skills; 4) OPC accuracies were examined by gate layer patterns on full chip level. The study is performed for 5X~4Xnm nodes lithographic processes. The main focus of the study was on usability of model that is made by measured source data in semiconductor manufacturing. Results clearly showed that the actual source for the optical model has merits and demerits." @default.
- W2136475700 created "2016-06-24" @default.
- W2136475700 creator A5006488624 @default.
- W2136475700 creator A5017698337 @default.
- W2136475700 creator A5030304824 @default.
- W2136475700 creator A5031989615 @default.
- W2136475700 creator A5044198619 @default.
- W2136475700 creator A5047237667 @default.
- W2136475700 creator A5047798767 @default.
- W2136475700 creator A5060674563 @default.
- W2136475700 creator A5065640846 @default.
- W2136475700 date "2009-12-03" @default.
- W2136475700 modified "2023-09-27" @default.
- W2136475700 title "Study of OPC accuracy by illumination source types" @default.
- W2136475700 doi "https://doi.org/10.1117/12.837224" @default.
- W2136475700 hasPublicationYear "2009" @default.
- W2136475700 type Work @default.
- W2136475700 sameAs 2136475700 @default.
- W2136475700 citedByCount "0" @default.
- W2136475700 crossrefType "proceedings-article" @default.
- W2136475700 hasAuthorship W2136475700A5006488624 @default.
- W2136475700 hasAuthorship W2136475700A5017698337 @default.
- W2136475700 hasAuthorship W2136475700A5030304824 @default.
- W2136475700 hasAuthorship W2136475700A5031989615 @default.
- W2136475700 hasAuthorship W2136475700A5044198619 @default.
- W2136475700 hasAuthorship W2136475700A5047237667 @default.
- W2136475700 hasAuthorship W2136475700A5047798767 @default.
- W2136475700 hasAuthorship W2136475700A5060674563 @default.
- W2136475700 hasAuthorship W2136475700A5065640846 @default.
- W2136475700 hasConcept C11413529 @default.
- W2136475700 hasConcept C120665830 @default.
- W2136475700 hasConcept C121332964 @default.
- W2136475700 hasConcept C127413603 @default.
- W2136475700 hasConcept C160671074 @default.
- W2136475700 hasConcept C165005293 @default.
- W2136475700 hasConcept C192562407 @default.
- W2136475700 hasConcept C195266298 @default.
- W2136475700 hasConcept C204223013 @default.
- W2136475700 hasConcept C207789793 @default.
- W2136475700 hasConcept C24326235 @default.
- W2136475700 hasConcept C28826006 @default.
- W2136475700 hasConcept C33923547 @default.
- W2136475700 hasConcept C41008148 @default.
- W2136475700 hasConcept C48209547 @default.
- W2136475700 hasConcept C49040817 @default.
- W2136475700 hasConcept C76155785 @default.
- W2136475700 hasConcept C76249512 @default.
- W2136475700 hasConcept C78371743 @default.
- W2136475700 hasConceptScore W2136475700C11413529 @default.
- W2136475700 hasConceptScore W2136475700C120665830 @default.
- W2136475700 hasConceptScore W2136475700C121332964 @default.
- W2136475700 hasConceptScore W2136475700C127413603 @default.
- W2136475700 hasConceptScore W2136475700C160671074 @default.
- W2136475700 hasConceptScore W2136475700C165005293 @default.
- W2136475700 hasConceptScore W2136475700C192562407 @default.
- W2136475700 hasConceptScore W2136475700C195266298 @default.
- W2136475700 hasConceptScore W2136475700C204223013 @default.
- W2136475700 hasConceptScore W2136475700C207789793 @default.
- W2136475700 hasConceptScore W2136475700C24326235 @default.
- W2136475700 hasConceptScore W2136475700C28826006 @default.
- W2136475700 hasConceptScore W2136475700C33923547 @default.
- W2136475700 hasConceptScore W2136475700C41008148 @default.
- W2136475700 hasConceptScore W2136475700C48209547 @default.
- W2136475700 hasConceptScore W2136475700C49040817 @default.
- W2136475700 hasConceptScore W2136475700C76155785 @default.
- W2136475700 hasConceptScore W2136475700C76249512 @default.
- W2136475700 hasConceptScore W2136475700C78371743 @default.
- W2136475700 hasLocation W21364757001 @default.
- W2136475700 hasOpenAccess W2136475700 @default.
- W2136475700 hasPrimaryLocation W21364757001 @default.
- W2136475700 hasRelatedWork W1965506953 @default.
- W2136475700 hasRelatedWork W1975058640 @default.
- W2136475700 hasRelatedWork W1975783263 @default.
- W2136475700 hasRelatedWork W1977766097 @default.
- W2136475700 hasRelatedWork W1983218957 @default.
- W2136475700 hasRelatedWork W1983967258 @default.
- W2136475700 hasRelatedWork W1993492995 @default.
- W2136475700 hasRelatedWork W2006931012 @default.
- W2136475700 hasRelatedWork W2013065232 @default.
- W2136475700 hasRelatedWork W2017127908 @default.
- W2136475700 hasRelatedWork W2019303455 @default.
- W2136475700 hasRelatedWork W2027773967 @default.
- W2136475700 hasRelatedWork W2028392977 @default.
- W2136475700 hasRelatedWork W2032410534 @default.
- W2136475700 hasRelatedWork W2036463062 @default.
- W2136475700 hasRelatedWork W2062094900 @default.
- W2136475700 hasRelatedWork W2063677888 @default.
- W2136475700 hasRelatedWork W2065683762 @default.
- W2136475700 hasRelatedWork W2345301122 @default.
- W2136475700 hasRelatedWork W3176403561 @default.
- W2136475700 isParatext "false" @default.
- W2136475700 isRetracted "false" @default.
- W2136475700 magId "2136475700" @default.
- W2136475700 workType "article" @default.