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• W2136702931 abstract "A mathematical model analyzing the efficacy of a built-in self-test technique, applicable to any symmetrical MEMS microstructure, is developed. The model predicts that the BIST technique can also be used to characterize a wide range of local manufacturing variations affecting different regions of the device. Model predictions have been validated by simulation. Specifically, it has been shown that by using a suitable modulation scheme, sensitivity to linear etch variation along a particular direction is improved by nearly 30%." @default.
• W2136702931 created "2016-06-24" @default.
• W2136702931 creator A5024420403 @default.
• W2136702931 creator A5091049578 @default.
• W2136702931 date "2004-06-10" @default.
• W2136702931 modified "2023-09-25" @default.
• W2136702931 title "Multi-modal built-in self-test for symmetric microsystems" @default.
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• W2136702931 doi "https://doi.org/10.1109/vtest.2004.1299237" @default.
• W2136702931 hasPublicationYear "2004" @default.
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