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• W2136956451 abstract "A novel prototype of an electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro-reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, thus enabling a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scanning. This MEMS platform is ultra-compact, supports circumferential imaging capability and is suitable for endoscopic optical coherence tomography (EOCT) applications, for example, for intravascular cancer detection." @default.
• W2136956451 created "2016-06-24" @default.
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• W2136956451 date "2012-03-05" @default.
• W2136956451 modified "2023-09-29" @default.
• W2136956451 title "Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe" @default.
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• W2136956451 doi "https://doi.org/10.1364/oe.20.006325" @default.
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