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- W2137173681 abstract "A method for on-wafer fabrication of free-chlorine sensors is described. The sensor structure consists of a planar three-electrode electrochemical cell covered with a polyHEMA hydrogel membrane. This membrane is photolithographically patterned on-wafer. In order to guarantee a good adhesion of the membrane to the electrode surface a special oxidation consisting of a treatment in an oxygen plasma has been developed followed by a silanization procedure. The optimal operational polarization voltage for detection of free chlorine was found to be +50 mV vs. SCE. Sensors with membrane thicknesses of 10 and 50 mu m were found to give approximately linear calibration curves between 0.1 and 5 mg/1 free chlorine, with sensitivities of 2 and 0.4 nA/(mg/1), respectively. >" @default.
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- W2137173681 date "2002-12-09" @default.
- W2137173681 modified "2023-09-28" @default.
- W2137173681 title "An on-wafer fabricated free-chlorine sensor" @default.
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- W2137173681 doi "https://doi.org/10.1109/sensor.1991.148845" @default.
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