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- W2137491722 abstract "Various metal carbides (TaC, HfC, WC, and VC) were thoroughly investigated for metal gate CMOS devices with band-edge work functions (WFs). It is found that TaC and HfC are more suitable for the CMOS device application among the various metal carbides. HfC is demonstrated to be a good candidate for NMOS because of its low WF and excellent thermal stability, while TaC Al shows a high WF and good thermal stability suitable for PMOS device application. In addition, HfC and TaC have a wide range of WF tunability using thin LaN and AlN interlayer or introduction of La and Al into the metal carbides." @default.
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- W2137491722 date "2008-09-01" @default.
- W2137491722 modified "2023-09-27" @default.
- W2137491722 title "Metal Carbides for Band-Edge Work Function Metal Gate CMOS Devices" @default.
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- W2137491722 doi "https://doi.org/10.1109/ted.2008.927946" @default.
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