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• W2137506412 abstract "Silicon nitride (SiN) micro- and nanomechanical resonators have attracted a lot of attention in various research fields due to their exceptionally high quality factors ($Qmathrm{s}$). Despite their popularity, the origin of the limiting loss mechanisms in these structures has remained controversial. In this Letter we propose an analytical model combining acoustic radiation loss with intrinsic loss. The model accurately predicts the resulting mode-dependent $Qmathrm{s}$ of low-stress silicon-rich and high-stress stoichiometric SiN membranes. The large acoustic mismatch of the low-stress membrane to the substrate seems to minimize radiation loss and $Qmathrm{s}$ of higher modes ($nensuremath{wedge}mensuremath{ge}3$) are limited by intrinsic losses. The study of these intrinsic losses in low-stress membranes reveals a linear dependence with the membrane thickness. This finding was confirmed by comparing the intrinsic dissipation of arbitrary (membranes, strings, and cantilevers) SiN resonators extracted from literature, suggesting surface loss as ubiquitous damping mechanism in thin SiN resonators with ${Q}_{text{surf}}=ensuremath{beta}h$ and $ensuremath{beta}=6ifmmodetimeselsetexttimesfi{}{10}^{10}ifmmodepmelsetextpmfi{}4ifmmodetimeselsetexttimesfi{}{10}^{10}text{ }text{ }{mathrm{m}}^{ensuremath{-}1}$. Based on the intrinsic loss the maximal achievable $Qmathrm{s}$ and $Qf$ products for SiN membranes and strings are outlined." @default.
• W2137506412 created "2016-06-24" @default.
• W2137506412 creator A5025457422 @default.
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• W2137506412 date "2014-11-25" @default.
• W2137506412 modified "2023-10-03" @default.
• W2137506412 title "Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators" @default.
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• W2137506412 doi "https://doi.org/10.1103/physrevlett.113.227201" @default.
• W2137506412 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/25494083" @default.
• W2137506412 hasPublicationYear "2014" @default.
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