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- W2137800972 abstract "The printing of line patterns using an attenuated phase shift mask (PSM) and an alternating PSM was examined through simulations. The attenuated PSM consisted of a bilayer structure, in which multiple interference provides a large latitude for appropriate thicknesses of the absorber and buffer layers. The attenuated PSM provides greater depth of focus (DOF) for sparse lines. The alternating PSM has better aerial-image contrast not only for dense lines but also for isolated lines. An additive structure is proposed for the alternating PSM, which does not require any etching of the glass substrate. Given an appropriate stack of materials, this structure provides a phase shift of 180 degrees and the same reflectance simultaneously. In this study, the printability of 18-nm-wide lines was investigated for an attenuated PSM with annular illumination and an alternating PSM with normal illumination with a small σ of 0.3." @default.
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- W2137800972 date "2003-06-13" @default.
- W2137800972 modified "2023-10-18" @default.
- W2137800972 title "Phase-shift mask in EUV lithography" @default.
- W2137800972 doi "https://doi.org/10.1117/12.484433" @default.
- W2137800972 hasPublicationYear "2003" @default.
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