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- W2137910306 abstract "Abstract Self-organized wrinkling of pre-strained nanomembranes into nanochannels is used to fabricate a fully integrated nanofluidic device for the development of ion field effect transistors (IFETs). Constrained by the structure and shape of the membrane, the deterministic wrinkling process leads to a versatile variation of channel types such as straight two-way channels, three-way branched channels, or even four-way intersection channels. The fabrication of straight channels is well controllable and offers the opportunity to integrate multiple IFET devices into a single chip. Thus, several IFETs are fabricated on a single chip using a III-V semiconductor substrate to control the ion separation and to measure the ion current of a diluted potassium chloride electrolyte solution." @default.
- W2137910306 created "2016-06-24" @default.
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- W2137910306 date "2011-03-14" @default.
- W2137910306 modified "2023-10-11" @default.
- W2137910306 title "Integrated sensitive on-chip ion field effect transistors based on wrinkled InGaAs nanomembranes" @default.
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- W2137910306 doi "https://doi.org/10.1186/1556-276x-6-215" @default.
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