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• W2138235790 endingPage "1622" @default.
• W2138235790 startingPage "1619" @default.
• W2138235790 abstract "Chlorine containing hydrogenated amorphous silicon films were deposited by adding HCl to SiH/sub 4/ containing plasmas. Bulk and surface bonding features, film thickness and optical band gap were examined by in situ infrared spectroscopies and spectroscopic ellipsometry. The introduction of HCl does not affect the deposition rate significantly. In situ infrared spectra show that the HCl introduction eliminates unfavorable higher hydride bonding structures (SiH/sub 2/ and/or SiH in voids) in the deposited bulk films, and increases the film density. The films deposited from mixtures of SiH/sub 4/ and HCl do not show significant optical band gap widening in spite of containing over 10/sup 21/ cm/sup -3/ Cl atoms, a concentration that is comparable to that of hydrogen. In situ infrared spectra show that the growing top surface is changed drastically from higher silicon hydride to chlorinated lower hydride." @default.
• W2138235790 created "2016-06-24" @default.
• W2138235790 creator A5020986374 @default.
• W2138235790 creator A5043625909 @default.
• W2138235790 creator A5062363884 @default.
• W2138235790 creator A5068756795 @default.
• W2138235790 creator A5071666501 @default.
• W2138235790 creator A5016060813 @default.
• W2138235790 date "2003-05-18" @default.
• W2138235790 modified "2023-09-23" @default.
• W2138235790 title "Chlorine containing hydrogenated amorphous silicon without optical band gap widening" @default.
• W2138235790 cites W1669819412 @default.
• W2138235790 cites W1981247648 @default.
• W2138235790 cites W2002121416 @default.
• W2138235790 cites W2005101831 @default.
• W2138235790 cites W2059800476 @default.
• W2138235790 cites W2061519262 @default.
• W2138235790 cites W2073304965 @default.
• W2138235790 cites W2077303266 @default.
• W2138235790 cites W2086992711 @default.
• W2138235790 cites W2087850792 @default.
• W2138235790 cites W2320438596 @default.
• W2138235790 cites W2479113758 @default.
• W2138235790 hasPublicationYear "2003" @default.
• W2138235790 type Work @default.
• W2138235790 sameAs 2138235790 @default.
• W2138235790 citedByCount "2" @default.
• W2138235790 countsByYear W21382357902017 @default.
• W2138235790 countsByYear W21382357902020 @default.
• W2138235790 crossrefType "proceedings-article" @default.
• W2138235790 hasAuthorship W2138235790A5016060813 @default.
• W2138235790 hasAuthorship W2138235790A5020986374 @default.
• W2138235790 hasAuthorship W2138235790A5043625909 @default.
• W2138235790 hasAuthorship W2138235790A5062363884 @default.
• W2138235790 hasAuthorship W2138235790A5068756795 @default.
• W2138235790 hasAuthorship W2138235790A5071666501 @default.
• W2138235790 hasConcept C113196181 @default.
• W2138235790 hasConcept C120665830 @default.
• W2138235790 hasConcept C121332964 @default.
• W2138235790 hasConcept C153642686 @default.
• W2138235790 hasConcept C158355884 @default.
• W2138235790 hasConcept C171250308 @default.
• W2138235790 hasConcept C178790620 @default.
• W2138235790 hasConcept C179104552 @default.
• W2138235790 hasConcept C181966813 @default.
• W2138235790 hasConcept C18293161 @default.
• W2138235790 hasConcept C185592680 @default.
• W2138235790 hasConcept C19067145 @default.
• W2138235790 hasConcept C191897082 @default.
• W2138235790 hasConcept C192562407 @default.
• W2138235790 hasConcept C2776390347 @default.
• W2138235790 hasConcept C2777961443 @default.
• W2138235790 hasConcept C2779667780 @default.
• W2138235790 hasConcept C49040817 @default.
• W2138235790 hasConcept C505241676 @default.
• W2138235790 hasConcept C512968161 @default.
• W2138235790 hasConcept C544956773 @default.
• W2138235790 hasConcept C56052488 @default.
• W2138235790 hasConcept C8010536 @default.
• W2138235790 hasConceptScore W2138235790C113196181 @default.
• W2138235790 hasConceptScore W2138235790C120665830 @default.
• W2138235790 hasConceptScore W2138235790C121332964 @default.
• W2138235790 hasConceptScore W2138235790C153642686 @default.
• W2138235790 hasConceptScore W2138235790C158355884 @default.
• W2138235790 hasConceptScore W2138235790C171250308 @default.
• W2138235790 hasConceptScore W2138235790C178790620 @default.
• W2138235790 hasConceptScore W2138235790C179104552 @default.
• W2138235790 hasConceptScore W2138235790C181966813 @default.
• W2138235790 hasConceptScore W2138235790C18293161 @default.
• W2138235790 hasConceptScore W2138235790C185592680 @default.
• W2138235790 hasConceptScore W2138235790C19067145 @default.
• W2138235790 hasConceptScore W2138235790C191897082 @default.
• W2138235790 hasConceptScore W2138235790C192562407 @default.
• W2138235790 hasConceptScore W2138235790C2776390347 @default.
• W2138235790 hasConceptScore W2138235790C2777961443 @default.
• W2138235790 hasConceptScore W2138235790C2779667780 @default.
• W2138235790 hasConceptScore W2138235790C49040817 @default.
• W2138235790 hasConceptScore W2138235790C505241676 @default.
• W2138235790 hasConceptScore W2138235790C512968161 @default.
• W2138235790 hasConceptScore W2138235790C544956773 @default.
• W2138235790 hasConceptScore W2138235790C56052488 @default.
• W2138235790 hasConceptScore W2138235790C8010536 @default.
• W2138235790 hasLocation W21382357901 @default.
• W2138235790 hasOpenAccess W2138235790 @default.
• W2138235790 hasPrimaryLocation W21382357901 @default.
• W2138235790 hasRelatedWork W1544320262 @default.
• W2138235790 hasRelatedWork W1965216159 @default.
• W2138235790 hasRelatedWork W1967457786 @default.
• W2138235790 hasRelatedWork W196894207 @default.
• W2138235790 hasRelatedWork W1979626067 @default.
• W2138235790 hasRelatedWork W2003186325 @default.
• W2138235790 hasRelatedWork W2005647566 @default.
• W2138235790 hasRelatedWork W2019489138 @default.
• W2138235790 hasRelatedWork W2023045062 @default.
• W2138235790 hasRelatedWork W2044840340 @default.
• W2138235790 hasRelatedWork W2055618864 @default.
• W2138235790 hasRelatedWork W2057495508 @default.
• W2138235790 hasRelatedWork W2074475688 @default.

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