Matches in SemOpenAlex for { <https://semopenalex.org/work/W2138338066> ?p ?o ?g. }
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98
with 100 items per page.
- W2138338066 endingPage "C31" @default.
- W2138338066 startingPage "C31" @default.
- W2138338066 abstract "Electrochemical impedance measurements were performed on copper bath solutions during copper deposition and subsequent aging of the bath. The results show a correlation between the low-frequency capacitive loop of the electrochemical impedance and copper deposit roughness. The deposit became smoother as the bath aged and reached an optimal value, after which the deposit became rougher. The optimal surface smoothness correlated with a minimum in the low-frequency capacitive loop diameter of the impedance. The results suggest that electrochemical impedance measurements may be used to monitor changes in the copper bath that affect copper deposit quality and superfilling capability. © 2004 The Electrochemical Society. All rights reserved." @default.
- W2138338066 created "2016-06-24" @default.
- W2138338066 creator A5000558924 @default.
- W2138338066 creator A5010040797 @default.
- W2138338066 creator A5014003965 @default.
- W2138338066 creator A5022767550 @default.
- W2138338066 creator A5042463084 @default.
- W2138338066 creator A5065764856 @default.
- W2138338066 date "2004-01-01" @default.
- W2138338066 modified "2023-09-25" @default.
- W2138338066 title "Electrochemical Impedance Spectroscopy Investigation of Bath Aging in Damascene Process Chemistries" @default.
- W2138338066 cites W1861829594 @default.
- W2138338066 cites W1958106671 @default.
- W2138338066 cites W1978238157 @default.
- W2138338066 cites W1980189381 @default.
- W2138338066 cites W1981085974 @default.
- W2138338066 cites W1999279146 @default.
- W2138338066 cites W2013779936 @default.
- W2138338066 cites W2018034176 @default.
- W2138338066 cites W2054256453 @default.
- W2138338066 cites W2078978190 @default.
- W2138338066 cites W2083633299 @default.
- W2138338066 cites W2089172305 @default.
- W2138338066 cites W2102692953 @default.
- W2138338066 cites W2109008398 @default.
- W2138338066 cites W2113238227 @default.
- W2138338066 cites W2167573287 @default.
- W2138338066 cites W2171908409 @default.
- W2138338066 doi "https://doi.org/10.1149/1.1643793" @default.
- W2138338066 hasPublicationYear "2004" @default.
- W2138338066 type Work @default.
- W2138338066 sameAs 2138338066 @default.
- W2138338066 citedByCount "10" @default.
- W2138338066 countsByYear W21383380662018 @default.
- W2138338066 crossrefType "journal-article" @default.
- W2138338066 hasAuthorship W2138338066A5000558924 @default.
- W2138338066 hasAuthorship W2138338066A5010040797 @default.
- W2138338066 hasAuthorship W2138338066A5014003965 @default.
- W2138338066 hasAuthorship W2138338066A5022767550 @default.
- W2138338066 hasAuthorship W2138338066A5042463084 @default.
- W2138338066 hasAuthorship W2138338066A5065764856 @default.
- W2138338066 hasConcept C107365816 @default.
- W2138338066 hasConcept C113196181 @default.
- W2138338066 hasConcept C116372231 @default.
- W2138338066 hasConcept C119599485 @default.
- W2138338066 hasConcept C127413603 @default.
- W2138338066 hasConcept C147789679 @default.
- W2138338066 hasConcept C159985019 @default.
- W2138338066 hasConcept C17525397 @default.
- W2138338066 hasConcept C17829176 @default.
- W2138338066 hasConcept C185592680 @default.
- W2138338066 hasConcept C191897082 @default.
- W2138338066 hasConcept C192562407 @default.
- W2138338066 hasConcept C206755178 @default.
- W2138338066 hasConcept C43617362 @default.
- W2138338066 hasConcept C52859227 @default.
- W2138338066 hasConcept C544778455 @default.
- W2138338066 hasConcept C7040849 @default.
- W2138338066 hasConcept C71039073 @default.
- W2138338066 hasConceptScore W2138338066C107365816 @default.
- W2138338066 hasConceptScore W2138338066C113196181 @default.
- W2138338066 hasConceptScore W2138338066C116372231 @default.
- W2138338066 hasConceptScore W2138338066C119599485 @default.
- W2138338066 hasConceptScore W2138338066C127413603 @default.
- W2138338066 hasConceptScore W2138338066C147789679 @default.
- W2138338066 hasConceptScore W2138338066C159985019 @default.
- W2138338066 hasConceptScore W2138338066C17525397 @default.
- W2138338066 hasConceptScore W2138338066C17829176 @default.
- W2138338066 hasConceptScore W2138338066C185592680 @default.
- W2138338066 hasConceptScore W2138338066C191897082 @default.
- W2138338066 hasConceptScore W2138338066C192562407 @default.
- W2138338066 hasConceptScore W2138338066C206755178 @default.
- W2138338066 hasConceptScore W2138338066C43617362 @default.
- W2138338066 hasConceptScore W2138338066C52859227 @default.
- W2138338066 hasConceptScore W2138338066C544778455 @default.
- W2138338066 hasConceptScore W2138338066C7040849 @default.
- W2138338066 hasConceptScore W2138338066C71039073 @default.
- W2138338066 hasIssue "3" @default.
- W2138338066 hasLocation W21383380661 @default.
- W2138338066 hasOpenAccess W2138338066 @default.
- W2138338066 hasPrimaryLocation W21383380661 @default.
- W2138338066 hasRelatedWork W2021286643 @default.
- W2138338066 hasRelatedWork W2038059641 @default.
- W2138338066 hasRelatedWork W2348388683 @default.
- W2138338066 hasRelatedWork W2351001050 @default.
- W2138338066 hasRelatedWork W2371536265 @default.
- W2138338066 hasRelatedWork W2567710719 @default.
- W2138338066 hasRelatedWork W2898872554 @default.
- W2138338066 hasRelatedWork W2922329832 @default.
- W2138338066 hasRelatedWork W3000482114 @default.
- W2138338066 hasRelatedWork W2466109112 @default.
- W2138338066 hasVolume "7" @default.
- W2138338066 isParatext "false" @default.
- W2138338066 isRetracted "false" @default.
- W2138338066 magId "2138338066" @default.
- W2138338066 workType "article" @default.