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- W2138564574 abstract "An optimized sol-gel process and an SU-8 photoresist were used to produce thick and high-aspect-ratio lead zirconate titanate (PZT) structures on platinized silicon substrates. The fabrication process involved single coating, lapping of the gel, and rapid firing. The PZT structures made with this new process were crack-free and had good crystallinity. Their XRD patterns and ferroelectric properties showed that the structures were high quality PZT. Values of relative permittivity and dielectric loss of the PZT were over 300 and 0.03, respectively. The structures had thickness of 20 /spl mu/m or higher, and had aspect ratio of over one." @default.
- W2138564574 created "2016-06-24" @default.
- W2138564574 creator A5001358835 @default.
- W2138564574 creator A5055249128 @default.
- W2138564574 creator A5084309021 @default.
- W2138564574 date "2003-06-25" @default.
- W2138564574 modified "2023-09-30" @default.
- W2138564574 title "Fabrication of high-aspect-ratio PZT thick film structure using sol-gel technique and SU-8 photoresist" @default.
- W2138564574 cites W1486022724 @default.
- W2138564574 cites W1867980795 @default.
- W2138564574 cites W1974629511 @default.
- W2138564574 cites W2001416172 @default.
- W2138564574 cites W2114316775 @default.
- W2138564574 cites W2128915321 @default.
- W2138564574 cites W2156984017 @default.
- W2138564574 cites W2162372488 @default.
- W2138564574 cites W2171519766 @default.
- W2138564574 doi "https://doi.org/10.1109/memsys.2002.984231" @default.
- W2138564574 hasPublicationYear "2003" @default.
- W2138564574 type Work @default.
- W2138564574 sameAs 2138564574 @default.
- W2138564574 citedByCount "3" @default.
- W2138564574 crossrefType "proceedings-article" @default.
- W2138564574 hasAuthorship W2138564574A5001358835 @default.
- W2138564574 hasAuthorship W2138564574A5055249128 @default.
- W2138564574 hasAuthorship W2138564574A5084309021 @default.
- W2138564574 hasConcept C109880203 @default.
- W2138564574 hasConcept C133386390 @default.
- W2138564574 hasConcept C134406635 @default.
- W2138564574 hasConcept C136525101 @default.
- W2138564574 hasConcept C13760523 @default.
- W2138564574 hasConcept C142724271 @default.
- W2138564574 hasConcept C159985019 @default.
- W2138564574 hasConcept C168651791 @default.
- W2138564574 hasConcept C171250308 @default.
- W2138564574 hasConcept C192562407 @default.
- W2138564574 hasConcept C204787440 @default.
- W2138564574 hasConcept C2779227376 @default.
- W2138564574 hasConcept C2781128178 @default.
- W2138564574 hasConcept C2781448156 @default.
- W2138564574 hasConcept C38398224 @default.
- W2138564574 hasConcept C46275449 @default.
- W2138564574 hasConcept C49040817 @default.
- W2138564574 hasConcept C544956773 @default.
- W2138564574 hasConcept C71924100 @default.
- W2138564574 hasConcept C79090758 @default.
- W2138564574 hasConcept C82558694 @default.
- W2138564574 hasConceptScore W2138564574C109880203 @default.
- W2138564574 hasConceptScore W2138564574C133386390 @default.
- W2138564574 hasConceptScore W2138564574C134406635 @default.
- W2138564574 hasConceptScore W2138564574C136525101 @default.
- W2138564574 hasConceptScore W2138564574C13760523 @default.
- W2138564574 hasConceptScore W2138564574C142724271 @default.
- W2138564574 hasConceptScore W2138564574C159985019 @default.
- W2138564574 hasConceptScore W2138564574C168651791 @default.
- W2138564574 hasConceptScore W2138564574C171250308 @default.
- W2138564574 hasConceptScore W2138564574C192562407 @default.
- W2138564574 hasConceptScore W2138564574C204787440 @default.
- W2138564574 hasConceptScore W2138564574C2779227376 @default.
- W2138564574 hasConceptScore W2138564574C2781128178 @default.
- W2138564574 hasConceptScore W2138564574C2781448156 @default.
- W2138564574 hasConceptScore W2138564574C38398224 @default.
- W2138564574 hasConceptScore W2138564574C46275449 @default.
- W2138564574 hasConceptScore W2138564574C49040817 @default.
- W2138564574 hasConceptScore W2138564574C544956773 @default.
- W2138564574 hasConceptScore W2138564574C71924100 @default.
- W2138564574 hasConceptScore W2138564574C79090758 @default.
- W2138564574 hasConceptScore W2138564574C82558694 @default.
- W2138564574 hasLocation W21385645741 @default.
- W2138564574 hasOpenAccess W2138564574 @default.
- W2138564574 hasPrimaryLocation W21385645741 @default.
- W2138564574 hasRelatedWork W1967190911 @default.
- W2138564574 hasRelatedWork W1970509152 @default.
- W2138564574 hasRelatedWork W1973743414 @default.
- W2138564574 hasRelatedWork W1975475585 @default.
- W2138564574 hasRelatedWork W1976124482 @default.
- W2138564574 hasRelatedWork W1993104698 @default.
- W2138564574 hasRelatedWork W2018613061 @default.
- W2138564574 hasRelatedWork W2027355360 @default.
- W2138564574 hasRelatedWork W2033416242 @default.
- W2138564574 hasRelatedWork W2036303088 @default.
- W2138564574 hasRelatedWork W2051274265 @default.
- W2138564574 hasRelatedWork W2056040496 @default.
- W2138564574 hasRelatedWork W2060820741 @default.
- W2138564574 hasRelatedWork W2104646321 @default.
- W2138564574 hasRelatedWork W2111303554 @default.
- W2138564574 hasRelatedWork W2132478094 @default.
- W2138564574 hasRelatedWork W2154523289 @default.
- W2138564574 hasRelatedWork W2289786838 @default.
- W2138564574 hasRelatedWork W2314880702 @default.
- W2138564574 hasRelatedWork W2895884130 @default.
- W2138564574 isParatext "false" @default.
- W2138564574 isRetracted "false" @default.
- W2138564574 magId "2138564574" @default.
- W2138564574 workType "article" @default.