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• W2138781891 abstract "We present a defect-free lithography method for printing periodic features with nanoscale resolution using coherent extreme ultraviolet light. This technique is based on the self-imaging effect known as the Talbot effect, which is produced when coherent light is diffracted by a periodic mask. We present a numerical simulation and an experimental verification of the method with a compact extreme ultraviolet laser. Furthermore, we explore the extent of defect tolerance by testing masks with different defect layouts. The experimental results are in good agreement with theoretical calculations." @default.
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• W2138781891 date "2012-08-27" @default.
• W2138781891 modified "2023-09-26" @default.
• W2138781891 title "Defect-tolerant extreme ultraviolet nanoscale printing" @default.
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• W2138781891 doi "https://doi.org/10.1364/ol.37.003633" @default.
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