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- W2139097252 abstract "An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D woodpile structure." @default.
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- W2139097252 date "2004-12-28" @default.
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- W2139097252 title "Alignment issues in photonic crystal device fabrication" @default.
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- W2139097252 doi "https://doi.org/10.1109/icton.2004.1360289" @default.
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