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- W2139132348 abstract "The most critical demand for high-brightness ion beams emerged from the realm of industrial applications of focused ion beams and it was met by using liquid metal ion source technology. Although recognized as a successful technology, liquid metal ion sources have major limitations in view of beam species. Noncontaminating ion beam species with beam brightness comparable to liquid metal ion source, i.e., /spl sim/10/sup 6/ A cm/sup -2/ sr/sup -1/ and energy spread of /spl sim/1 eV will be ideal for many cutting-edge applications including ion beam milling, mask repair, and imaging studies. This paper attempts to bring out the essential points in the development of high-resolution probe forming beams. With this specific objective in view, this study is based on an analysis of point sources and then a variety of other sources, under the general classification of broad source (primarily plasma sources), are discussed. Several sources in this category including a Penning-type source, a multicusp source, and new-generation high-charged state sources seem to have merits for circumventing the limitations of liquid metal ion sources, although further research is needed to improve the beam brightness and advance the state-of-the art." @default.
- W2139132348 created "2016-06-24" @default.
- W2139132348 creator A5032896613 @default.
- W2139132348 creator A5057900432 @default.
- W2139132348 creator A5061818065 @default.
- W2139132348 date "2005-12-01" @default.
- W2139132348 modified "2023-10-02" @default.
- W2139132348 title "Ion beams and their applications in high-resolution probe formation" @default.
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