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- W2139263227 abstract "We have developed a new type SO/sub 2/ gas sensor applying a particular inorganic thin film on SAW devices. The sensor consists of twin SAW oscillators of the center frequency of 54 MHz fabricated on LiTaO/sub 3/ piezoelectric single crystals. One delay line of the sensor is coated with a CdS thin film that selectively adsorbs and desorbs SO/sub 2/, while the other is uncoated for use as a stable reference. Deposition of CdS thin films has been carried out by the spray pyrolysis method using an ultrasonic nozzle. Mass loading induced by the SO/sub 2/ gas adsorbed onto the CdS film result in corresponding frequency shifts directively proportional to the gas concentration. The relative change in the frequency of the two oscillators is monitored with a digital signal processing circuit to measure the concentration of the gas. SO/sub 2/ sensor properties investigated include selectivity, sensitivity, response time, and repeatability. The sensor shows promising performance as a micro sensing tool and is capable of measuring concentrations in air less than 100 parts per billion of SO/sub 2/. The optimum substrate temperature is found to be 65/spl deg/C for proper operation of the sensor." @default.
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- W2139263227 date "2002-11-19" @default.
- W2139263227 modified "2023-09-27" @default.
- W2139263227 title "Development of SAW gas sensor for monitoring SO/sub X/ gas" @default.
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- W2139263227 doi "https://doi.org/10.1109/ultsym.1995.495622" @default.
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