Matches in SemOpenAlex for { <https://semopenalex.org/work/W2139303819> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2139303819 endingPage "L1686" @default.
- W2139303819 startingPage "L1686" @default.
- W2139303819 abstract "In conventional ICP (or TCP) reactors, a rf power is inductively coupled to an antenna placed outside a plasma vessel. Such an external coupling system is known to have several disadvantages. In order to avoid these disadvantages, a new internal coupling system has been developed in which a bare metal antenna is directly immersed in a plasma, thus forming a full metal reactor. This is accomplished by generating magnetic field lines around an antenna conductor, which effectively suppress the electron loss at the antenna and hence suppress the anomalous rise of plasma potential. Magnetic fields near the antenna are formed by superposing a dc current on a rf current along the antenna. This type of ICP enables rf discharges at rather low pressures such as ∼3×10 -4 Torr due to the magnetron effect. Other characteristics of internal metal antennas are also discussed." @default.
- W2139303819 created "2016-06-24" @default.
- W2139303819 creator A5028908513 @default.
- W2139303819 creator A5037804650 @default.
- W2139303819 creator A5060203441 @default.
- W2139303819 date "1995-12-01" @default.
- W2139303819 modified "2023-09-26" @default.
- W2139303819 title "New Inductive rf Discharge Using an Internal Metal Antenna" @default.
- W2139303819 cites W1969069387 @default.
- W2139303819 cites W2020674775 @default.
- W2139303819 cites W2049967940 @default.
- W2139303819 doi "https://doi.org/10.1143/jjap.34.l1686" @default.
- W2139303819 hasPublicationYear "1995" @default.
- W2139303819 type Work @default.
- W2139303819 sameAs 2139303819 @default.
- W2139303819 citedByCount "23" @default.
- W2139303819 countsByYear W21393038192016 @default.
- W2139303819 countsByYear W21393038192020 @default.
- W2139303819 countsByYear W21393038192021 @default.
- W2139303819 countsByYear W21393038192022 @default.
- W2139303819 crossrefType "journal-article" @default.
- W2139303819 hasAuthorship W2139303819A5028908513 @default.
- W2139303819 hasAuthorship W2139303819A5037804650 @default.
- W2139303819 hasAuthorship W2139303819A5060203441 @default.
- W2139303819 hasConcept C119599485 @default.
- W2139303819 hasConcept C121332964 @default.
- W2139303819 hasConcept C127413603 @default.
- W2139303819 hasConcept C131584629 @default.
- W2139303819 hasConcept C155711043 @default.
- W2139303819 hasConcept C158616128 @default.
- W2139303819 hasConcept C159985019 @default.
- W2139303819 hasConcept C177872590 @default.
- W2139303819 hasConcept C192562407 @default.
- W2139303819 hasConcept C196931383 @default.
- W2139303819 hasConcept C21822782 @default.
- W2139303819 hasConcept C49040817 @default.
- W2139303819 hasConcept C62520636 @default.
- W2139303819 hasConcept C74064498 @default.
- W2139303819 hasConcept C82706917 @default.
- W2139303819 hasConcept C95974651 @default.
- W2139303819 hasConceptScore W2139303819C119599485 @default.
- W2139303819 hasConceptScore W2139303819C121332964 @default.
- W2139303819 hasConceptScore W2139303819C127413603 @default.
- W2139303819 hasConceptScore W2139303819C131584629 @default.
- W2139303819 hasConceptScore W2139303819C155711043 @default.
- W2139303819 hasConceptScore W2139303819C158616128 @default.
- W2139303819 hasConceptScore W2139303819C159985019 @default.
- W2139303819 hasConceptScore W2139303819C177872590 @default.
- W2139303819 hasConceptScore W2139303819C192562407 @default.
- W2139303819 hasConceptScore W2139303819C196931383 @default.
- W2139303819 hasConceptScore W2139303819C21822782 @default.
- W2139303819 hasConceptScore W2139303819C49040817 @default.
- W2139303819 hasConceptScore W2139303819C62520636 @default.
- W2139303819 hasConceptScore W2139303819C74064498 @default.
- W2139303819 hasConceptScore W2139303819C82706917 @default.
- W2139303819 hasConceptScore W2139303819C95974651 @default.
- W2139303819 hasIssue "12B" @default.
- W2139303819 hasLocation W21393038191 @default.
- W2139303819 hasOpenAccess W2139303819 @default.
- W2139303819 hasPrimaryLocation W21393038191 @default.
- W2139303819 hasRelatedWork W2080038339 @default.
- W2139303819 hasRelatedWork W2081483206 @default.
- W2139303819 hasRelatedWork W2110614971 @default.
- W2139303819 hasRelatedWork W2132617634 @default.
- W2139303819 hasRelatedWork W2139303819 @default.
- W2139303819 hasRelatedWork W2151340902 @default.
- W2139303819 hasRelatedWork W2386175243 @default.
- W2139303819 hasRelatedWork W2573196845 @default.
- W2139303819 hasRelatedWork W3213299373 @default.
- W2139303819 hasRelatedWork W4300426641 @default.
- W2139303819 hasVolume "34" @default.
- W2139303819 isParatext "false" @default.
- W2139303819 isRetracted "false" @default.
- W2139303819 magId "2139303819" @default.
- W2139303819 workType "article" @default.