FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2139700950> ?p ?o ?g. }

• W2139700950 endingPage "423" @default.
• W2139700950 startingPage "417" @default.
• W2139700950 abstract "Ion current density measurements were made in an electron cyclotron resonance (ECR) plasma reactor for both argon and oxygen discharges. Spatial changes in the ion current density were also recorded across the reactor diameter for changes in pressure and power. These measurements revealed a minimum in the ion current density on the reactor axis. This observation has been explained as a consequence of the shape of the ECR region, which, in turn, is dependent on the mode of coupling. Current density measurements were made as a function of reactor pressure and microwave power for two different axial locations in the system. A Langmuir probe was also used at these two locations to measure the electron temperature as a function of these process conditions. It was observed that the ion current density and/or plasma density measured downstream from the ECR zone, increased significantly in the low-pressure/high-microwave power region. Results from this region of the operating parameter space have not previously been reported. Further existing models do not predict this observed increase in plasma density or ion current density. It has been proposed that a rarefication of the gas in the ECR region, as a result of gas heating, has acted to increase the outward diffusion of electrons from the ECR zone and, thus, has increased the ambipolar diffusion of ions to the downstream location. This proposal has been partially validated by experimental results in which the ion energy was measured as a function of reactor pressure and gas flow rate. The shape of the oxygen parameter space map differs significantly from that for Ar. The principal reasons for these changes are a number of different inelastic electron scattering mechanisms which effect the transport electrons out of the ECR zone and through ambipolar diffusion also the transport of ions. The second factor is the production of negative ionic species which varies with reactor pressure and, thus, T/sub e/." @default.
• W2139700950 created "2016-06-24" @default.
• W2139700950 creator A5018483944 @default.
• W2139700950 creator A5026545043 @default.
• W2139700950 creator A5041789509 @default.
• W2139700950 date "2001-06-01" @default.
• W2139700950 modified "2023-09-26" @default.
• W2139700950 title "Parameter space map of an electron cyclotron resonance plasma in a compact chamber" @default.
• W2139700950 cites W1969416697 @default.
• W2139700950 cites W1975676062 @default.
• W2139700950 cites W1983706256 @default.
• W2139700950 cites W2002248535 @default.
• W2139700950 cites W2004308155 @default.
• W2139700950 cites W2022372038 @default.
• W2139700950 cites W2032227296 @default.
• W2139700950 cites W2038471375 @default.
• W2139700950 cites W2050319692 @default.
• W2139700950 cites W2064535388 @default.
• W2139700950 cites W2082736480 @default.
• W2139700950 cites W2086066190 @default.
• W2139700950 cites W2103652310 @default.
• W2139700950 cites W2116779634 @default.
• W2139700950 cites W2124780900 @default.
• W2139700950 cites W2140566506 @default.
• W2139700950 cites W3146732660 @default.
• W2139700950 cites W4365787421 @default.
• W2139700950 cites W597809786 @default.
• W2139700950 doi "https://doi.org/10.1109/27.928938" @default.
• W2139700950 hasPublicationYear "2001" @default.
• W2139700950 type Work @default.
• W2139700950 sameAs 2139700950 @default.
• W2139700950 citedByCount "4" @default.
• W2139700950 countsByYear W21397009502012 @default.
• W2139700950 countsByYear W21397009502016 @default.
• W2139700950 countsByYear W21397009502019 @default.
• W2139700950 crossrefType "journal-article" @default.
• W2139700950 hasAuthorship W2139700950A5018483944 @default.
• W2139700950 hasAuthorship W2139700950A5026545043 @default.
• W2139700950 hasAuthorship W2139700950A5041789509 @default.
• W2139700950 hasConcept C121332964 @default.
• W2139700950 hasConcept C125485243 @default.
• W2139700950 hasConcept C145148216 @default.
• W2139700950 hasConcept C147120987 @default.
• W2139700950 hasConcept C175361016 @default.
• W2139700950 hasConcept C176118016 @default.
• W2139700950 hasConcept C178790620 @default.
• W2139700950 hasConcept C184779094 @default.
• W2139700950 hasConcept C185544564 @default.
• W2139700950 hasConcept C185592680 @default.
• W2139700950 hasConcept C192039680 @default.
• W2139700950 hasConcept C192562407 @default.
• W2139700950 hasConcept C207740977 @default.
• W2139700950 hasConcept C22175881 @default.
• W2139700950 hasConcept C25621703 @default.
• W2139700950 hasConcept C2778220808 @default.
• W2139700950 hasConcept C2778865910 @default.
• W2139700950 hasConcept C43503373 @default.
• W2139700950 hasConcept C547737533 @default.
• W2139700950 hasConcept C62520636 @default.
• W2139700950 hasConcept C82706917 @default.
• W2139700950 hasConceptScore W2139700950C121332964 @default.
• W2139700950 hasConceptScore W2139700950C125485243 @default.
• W2139700950 hasConceptScore W2139700950C145148216 @default.
• W2139700950 hasConceptScore W2139700950C147120987 @default.
• W2139700950 hasConceptScore W2139700950C175361016 @default.
• W2139700950 hasConceptScore W2139700950C176118016 @default.
• W2139700950 hasConceptScore W2139700950C178790620 @default.
• W2139700950 hasConceptScore W2139700950C184779094 @default.
• W2139700950 hasConceptScore W2139700950C185544564 @default.
• W2139700950 hasConceptScore W2139700950C185592680 @default.
• W2139700950 hasConceptScore W2139700950C192039680 @default.
• W2139700950 hasConceptScore W2139700950C192562407 @default.
• W2139700950 hasConceptScore W2139700950C207740977 @default.
• W2139700950 hasConceptScore W2139700950C22175881 @default.
• W2139700950 hasConceptScore W2139700950C25621703 @default.
• W2139700950 hasConceptScore W2139700950C2778220808 @default.
• W2139700950 hasConceptScore W2139700950C2778865910 @default.
• W2139700950 hasConceptScore W2139700950C43503373 @default.
• W2139700950 hasConceptScore W2139700950C547737533 @default.
• W2139700950 hasConceptScore W2139700950C62520636 @default.
• W2139700950 hasConceptScore W2139700950C82706917 @default.
• W2139700950 hasIssue "3" @default.
• W2139700950 hasLocation W21397009501 @default.
• W2139700950 hasOpenAccess W2139700950 @default.
• W2139700950 hasPrimaryLocation W21397009501 @default.
• W2139700950 hasRelatedWork W1619276345 @default.
• W2139700950 hasRelatedWork W2038366308 @default.
• W2139700950 hasRelatedWork W2062787641 @default.
• W2139700950 hasRelatedWork W2063771729 @default.
• W2139700950 hasRelatedWork W2094019959 @default.
• W2139700950 hasRelatedWork W2139700950 @default.
• W2139700950 hasRelatedWork W2168835588 @default.
• W2139700950 hasRelatedWork W2541109868 @default.
• W2139700950 hasRelatedWork W3149114887 @default.
• W2139700950 hasRelatedWork W4367186977 @default.
• W2139700950 hasVolume "29" @default.
• W2139700950 isParatext "false" @default.
• W2139700950 isRetracted "false" @default.

• next