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• W2140273145 abstract "A novel electro-optical sensing method for measuring the displacements of a micromachined accelerometer proof mass is described. By using on-chip integrated photodiodes, and by modulating the illumination, accelerations at very low frequencies are detected. A 10 µg/√Hz noise equivalent acceleration (NEA) is predicted. Characterisation of the CMOS read-out circuits and on-chip integrated sensing photodiodes is presented. Preliminary measurements on a prototype device are reported." @default.
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• W2140273145 date "1998-01-01" @default.
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• W2140273145 title "Micromachined accelerometer with modulated integrative differential optical sensing" @default.
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• W2140273145 doi "https://doi.org/10.1049/el:19980484" @default.
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