FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2140305622> ?p ?o ?g. }

• W2140305622 abstract "Back-end-of-line (BEOL) reliability, comprising barrier, dielectric and current-carrying metal reliability, is a major challenge for future IC generations as the reliability margin of the dielectric/barrier/copper systems is shrinking. The impact of interconnect scaling on BEOL reliability is outlined and illustrated by low-k TDDB, electromigration and stress-induced-voiding results." @default.
• W2140305622 created "2016-06-24" @default.
• W2140305622 creator A5028866616 @default.
• W2140305622 creator A5039055094 @default.
• W2140305622 creator A5049415979 @default.
• W2140305622 creator A5067040566 @default.
• W2140305622 creator A5083194625 @default.
• W2140305622 creator A5085512740 @default.
• W2140305622 date "2005-08-16" @default.
• W2140305622 modified "2023-10-18" @default.
• W2140305622 title "The impact of scaling on interconnect reliability" @default.
• W2140305622 cites W1667336151 @default.
• W2140305622 cites W1898734385 @default.
• W2140305622 cites W1965463024 @default.
• W2140305622 cites W1971983657 @default.
• W2140305622 cites W1994416434 @default.
• W2140305622 cites W1996013151 @default.
• W2140305622 cites W2004606690 @default.
• W2140305622 cites W2009221461 @default.
• W2140305622 cites W2025975878 @default.
• W2140305622 cites W2045383364 @default.
• W2140305622 cites W2046384069 @default.
• W2140305622 cites W2047404361 @default.
• W2140305622 cites W2057516428 @default.
• W2140305622 cites W2062496493 @default.
• W2140305622 cites W2070410638 @default.
• W2140305622 cites W2075082608 @default.
• W2140305622 cites W2077241659 @default.
• W2140305622 cites W2081786181 @default.
• W2140305622 cites W2121990706 @default.
• W2140305622 cites W2140227009 @default.
• W2140305622 cites W2149529903 @default.
• W2140305622 cites W2152995352 @default.
• W2140305622 cites W2154555437 @default.
• W2140305622 cites W2394709635 @default.
• W2140305622 cites W2400296751 @default.
• W2140305622 cites W2403276564 @default.
• W2140305622 doi "https://doi.org/10.1109/relphy.2005.1493054" @default.
• W2140305622 hasPublicationYear "2005" @default.
• W2140305622 type Work @default.
• W2140305622 sameAs 2140305622 @default.
• W2140305622 citedByCount "9" @default.
• W2140305622 countsByYear W21403056222013 @default.
• W2140305622 crossrefType "proceedings-article" @default.
• W2140305622 hasAuthorship W2140305622A5028866616 @default.
• W2140305622 hasAuthorship W2140305622A5039055094 @default.
• W2140305622 hasAuthorship W2140305622A5049415979 @default.
• W2140305622 hasAuthorship W2140305622A5067040566 @default.
• W2140305622 hasAuthorship W2140305622A5083194625 @default.
• W2140305622 hasAuthorship W2140305622A5085512740 @default.
• W2140305622 hasConcept C119599485 @default.
• W2140305622 hasConcept C121332964 @default.
• W2140305622 hasConcept C123745756 @default.
• W2140305622 hasConcept C127413603 @default.
• W2140305622 hasConcept C133386390 @default.
• W2140305622 hasConcept C138055206 @default.
• W2140305622 hasConcept C138885662 @default.
• W2140305622 hasConcept C152909973 @default.
• W2140305622 hasConcept C159985019 @default.
• W2140305622 hasConcept C163258240 @default.
• W2140305622 hasConcept C165801399 @default.
• W2140305622 hasConcept C166972891 @default.
• W2140305622 hasConcept C172385210 @default.
• W2140305622 hasConcept C192562407 @default.
• W2140305622 hasConcept C200601418 @default.
• W2140305622 hasConcept C21036866 @default.
• W2140305622 hasConcept C24326235 @default.
• W2140305622 hasConcept C2524010 @default.
• W2140305622 hasConcept C2776628375 @default.
• W2140305622 hasConcept C2779866884 @default.
• W2140305622 hasConcept C33923547 @default.
• W2140305622 hasConcept C41008148 @default.
• W2140305622 hasConcept C41895202 @default.
• W2140305622 hasConcept C43214815 @default.
• W2140305622 hasConcept C49040817 @default.
• W2140305622 hasConcept C62520636 @default.
• W2140305622 hasConcept C70401718 @default.
• W2140305622 hasConcept C76155785 @default.
• W2140305622 hasConcept C99844830 @default.
• W2140305622 hasConceptScore W2140305622C119599485 @default.
• W2140305622 hasConceptScore W2140305622C121332964 @default.
• W2140305622 hasConceptScore W2140305622C123745756 @default.
• W2140305622 hasConceptScore W2140305622C127413603 @default.
• W2140305622 hasConceptScore W2140305622C133386390 @default.
• W2140305622 hasConceptScore W2140305622C138055206 @default.
• W2140305622 hasConceptScore W2140305622C138885662 @default.
• W2140305622 hasConceptScore W2140305622C152909973 @default.
• W2140305622 hasConceptScore W2140305622C159985019 @default.
• W2140305622 hasConceptScore W2140305622C163258240 @default.
• W2140305622 hasConceptScore W2140305622C165801399 @default.
• W2140305622 hasConceptScore W2140305622C166972891 @default.
• W2140305622 hasConceptScore W2140305622C172385210 @default.
• W2140305622 hasConceptScore W2140305622C192562407 @default.
• W2140305622 hasConceptScore W2140305622C200601418 @default.
• W2140305622 hasConceptScore W2140305622C21036866 @default.
• W2140305622 hasConceptScore W2140305622C24326235 @default.
• W2140305622 hasConceptScore W2140305622C2524010 @default.
• W2140305622 hasConceptScore W2140305622C2776628375 @default.
• W2140305622 hasConceptScore W2140305622C2779866884 @default.
• W2140305622 hasConceptScore W2140305622C33923547 @default.

• next