Matches in SemOpenAlex for { <https://semopenalex.org/work/W2141019149> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2141019149 abstract "This paper presents a method used to produce TiO/sub 2/ sensitive layers based on the selective anodization of the titanium thin film realised by vacuum evaporation. Photoresist was used as mask for anodization. The thickness of the TiO/sub 2/ layers obtained in this experiment was between 1000-1200 /spl Aring/. IR and X-ray investigation were performed in order to characterize the structure of the layer. Sensitivity to O/sub 2/ was measured using a dedicated micromachine silicon structure. A quasilinear dependence of the resistivity of the TiO/sub 2/ layer versus the O/sub 2/ concentration was observed in the range of 100-10000 ppm." @default.
- W2141019149 created "2016-06-24" @default.
- W2141019149 creator A5000006050 @default.
- W2141019149 creator A5031110098 @default.
- W2141019149 creator A5045512476 @default.
- W2141019149 creator A5054458465 @default.
- W2141019149 date "2002-11-27" @default.
- W2141019149 modified "2023-09-26" @default.
- W2141019149 title "TiO/sub 2/ anodic oxide films for oxygen gas sensors" @default.
- W2141019149 cites W1818659195 @default.
- W2141019149 cites W2000634009 @default.
- W2141019149 cites W2075223642 @default.
- W2141019149 doi "https://doi.org/10.1109/smicnd.1998.733813" @default.
- W2141019149 hasPublicationYear "2002" @default.
- W2141019149 type Work @default.
- W2141019149 sameAs 2141019149 @default.
- W2141019149 citedByCount "0" @default.
- W2141019149 crossrefType "proceedings-article" @default.
- W2141019149 hasAuthorship W2141019149A5000006050 @default.
- W2141019149 hasAuthorship W2141019149A5031110098 @default.
- W2141019149 hasAuthorship W2141019149A5045512476 @default.
- W2141019149 hasAuthorship W2141019149A5054458465 @default.
- W2141019149 hasConcept C113196181 @default.
- W2141019149 hasConcept C119599485 @default.
- W2141019149 hasConcept C121332964 @default.
- W2141019149 hasConcept C127413603 @default.
- W2141019149 hasConcept C134406635 @default.
- W2141019149 hasConcept C159985019 @default.
- W2141019149 hasConcept C166524527 @default.
- W2141019149 hasConcept C171250308 @default.
- W2141019149 hasConcept C185592680 @default.
- W2141019149 hasConcept C19067145 @default.
- W2141019149 hasConcept C191897082 @default.
- W2141019149 hasConcept C192562407 @default.
- W2141019149 hasConcept C22016385 @default.
- W2141019149 hasConcept C2779192298 @default.
- W2141019149 hasConcept C2779227376 @default.
- W2141019149 hasConcept C2779851234 @default.
- W2141019149 hasConcept C42360764 @default.
- W2141019149 hasConcept C43617362 @default.
- W2141019149 hasConcept C49040817 @default.
- W2141019149 hasConcept C506065880 @default.
- W2141019149 hasConcept C513153333 @default.
- W2141019149 hasConcept C544956773 @default.
- W2141019149 hasConcept C61441594 @default.
- W2141019149 hasConcept C69990965 @default.
- W2141019149 hasConcept C97355855 @default.
- W2141019149 hasConceptScore W2141019149C113196181 @default.
- W2141019149 hasConceptScore W2141019149C119599485 @default.
- W2141019149 hasConceptScore W2141019149C121332964 @default.
- W2141019149 hasConceptScore W2141019149C127413603 @default.
- W2141019149 hasConceptScore W2141019149C134406635 @default.
- W2141019149 hasConceptScore W2141019149C159985019 @default.
- W2141019149 hasConceptScore W2141019149C166524527 @default.
- W2141019149 hasConceptScore W2141019149C171250308 @default.
- W2141019149 hasConceptScore W2141019149C185592680 @default.
- W2141019149 hasConceptScore W2141019149C19067145 @default.
- W2141019149 hasConceptScore W2141019149C191897082 @default.
- W2141019149 hasConceptScore W2141019149C192562407 @default.
- W2141019149 hasConceptScore W2141019149C22016385 @default.
- W2141019149 hasConceptScore W2141019149C2779192298 @default.
- W2141019149 hasConceptScore W2141019149C2779227376 @default.
- W2141019149 hasConceptScore W2141019149C2779851234 @default.
- W2141019149 hasConceptScore W2141019149C42360764 @default.
- W2141019149 hasConceptScore W2141019149C43617362 @default.
- W2141019149 hasConceptScore W2141019149C49040817 @default.
- W2141019149 hasConceptScore W2141019149C506065880 @default.
- W2141019149 hasConceptScore W2141019149C513153333 @default.
- W2141019149 hasConceptScore W2141019149C544956773 @default.
- W2141019149 hasConceptScore W2141019149C61441594 @default.
- W2141019149 hasConceptScore W2141019149C69990965 @default.
- W2141019149 hasConceptScore W2141019149C97355855 @default.
- W2141019149 hasLocation W21410191491 @default.
- W2141019149 hasOpenAccess W2141019149 @default.
- W2141019149 hasPrimaryLocation W21410191491 @default.
- W2141019149 hasRelatedWork W1485957357 @default.
- W2141019149 hasRelatedWork W1548341680 @default.
- W2141019149 hasRelatedWork W1877558290 @default.
- W2141019149 hasRelatedWork W1887175750 @default.
- W2141019149 hasRelatedWork W1948596479 @default.
- W2141019149 hasRelatedWork W1961136847 @default.
- W2141019149 hasRelatedWork W1974279657 @default.
- W2141019149 hasRelatedWork W2019629362 @default.
- W2141019149 hasRelatedWork W2034689246 @default.
- W2141019149 hasRelatedWork W2044514143 @default.
- W2141019149 hasRelatedWork W2050675400 @default.
- W2141019149 hasRelatedWork W2111936620 @default.
- W2141019149 hasRelatedWork W2146629715 @default.
- W2141019149 hasRelatedWork W2164977090 @default.
- W2141019149 hasRelatedWork W2336233003 @default.
- W2141019149 hasRelatedWork W2487435117 @default.
- W2141019149 hasRelatedWork W2546636779 @default.
- W2141019149 hasRelatedWork W2739633417 @default.
- W2141019149 hasRelatedWork W337242232 @default.
- W2141019149 hasRelatedWork W2071632785 @default.
- W2141019149 isParatext "false" @default.
- W2141019149 isRetracted "false" @default.
- W2141019149 magId "2141019149" @default.
- W2141019149 workType "article" @default.