Matches in SemOpenAlex for { <https://semopenalex.org/work/W2141245257> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W2141245257 endingPage "336" @default.
- W2141245257 startingPage "329" @default.
- W2141245257 abstract "Ruthenium is promoted as one of the most efficient metallization contact material in MEMS technology. In a good agreement with MEMS technology requirement, a cost friendly chemical mixture based on sodium hypochlorite is proposed hereafter to achieve a robust and reliable ruthenium wet etching process through a resist mask in a 200mm single wafer spray tool." @default.
- W2141245257 created "2016-06-24" @default.
- W2141245257 creator A5018343848 @default.
- W2141245257 creator A5023790456 @default.
- W2141245257 creator A5033284727 @default.
- W2141245257 creator A5055064071 @default.
- W2141245257 date "2009-09-25" @default.
- W2141245257 modified "2023-10-14" @default.
- W2141245257 title "Ruthenium Wet Etch on 200mm MEMS Wafers with Sodium Hypochlorite" @default.
- W2141245257 doi "https://doi.org/10.1149/1.3202670" @default.
- W2141245257 hasPublicationYear "2009" @default.
- W2141245257 type Work @default.
- W2141245257 sameAs 2141245257 @default.
- W2141245257 citedByCount "5" @default.
- W2141245257 countsByYear W21412452572012 @default.
- W2141245257 countsByYear W21412452572019 @default.
- W2141245257 countsByYear W21412452572023 @default.
- W2141245257 crossrefType "journal-article" @default.
- W2141245257 hasAuthorship W2141245257A5018343848 @default.
- W2141245257 hasAuthorship W2141245257A5023790456 @default.
- W2141245257 hasAuthorship W2141245257A5033284727 @default.
- W2141245257 hasAuthorship W2141245257A5055064071 @default.
- W2141245257 hasConcept C100460472 @default.
- W2141245257 hasConcept C160671074 @default.
- W2141245257 hasConcept C161790260 @default.
- W2141245257 hasConcept C171250308 @default.
- W2141245257 hasConcept C178790620 @default.
- W2141245257 hasConcept C179104552 @default.
- W2141245257 hasConcept C185592680 @default.
- W2141245257 hasConcept C192562407 @default.
- W2141245257 hasConcept C2776776456 @default.
- W2141245257 hasConcept C2776832558 @default.
- W2141245257 hasConcept C2779227376 @default.
- W2141245257 hasConcept C37977207 @default.
- W2141245257 hasConcept C555196967 @default.
- W2141245257 hasConceptScore W2141245257C100460472 @default.
- W2141245257 hasConceptScore W2141245257C160671074 @default.
- W2141245257 hasConceptScore W2141245257C161790260 @default.
- W2141245257 hasConceptScore W2141245257C171250308 @default.
- W2141245257 hasConceptScore W2141245257C178790620 @default.
- W2141245257 hasConceptScore W2141245257C179104552 @default.
- W2141245257 hasConceptScore W2141245257C185592680 @default.
- W2141245257 hasConceptScore W2141245257C192562407 @default.
- W2141245257 hasConceptScore W2141245257C2776776456 @default.
- W2141245257 hasConceptScore W2141245257C2776832558 @default.
- W2141245257 hasConceptScore W2141245257C2779227376 @default.
- W2141245257 hasConceptScore W2141245257C37977207 @default.
- W2141245257 hasConceptScore W2141245257C555196967 @default.
- W2141245257 hasIssue "5" @default.
- W2141245257 hasLocation W21412452571 @default.
- W2141245257 hasOpenAccess W2141245257 @default.
- W2141245257 hasPrimaryLocation W21412452571 @default.
- W2141245257 hasRelatedWork W1955183922 @default.
- W2141245257 hasRelatedWork W1983206552 @default.
- W2141245257 hasRelatedWork W2018742057 @default.
- W2141245257 hasRelatedWork W2027983671 @default.
- W2141245257 hasRelatedWork W2068653573 @default.
- W2141245257 hasRelatedWork W2319553538 @default.
- W2141245257 hasRelatedWork W2399418765 @default.
- W2141245257 hasRelatedWork W2990182974 @default.
- W2141245257 hasRelatedWork W4211152510 @default.
- W2141245257 hasRelatedWork W4239023021 @default.
- W2141245257 hasVolume "25" @default.
- W2141245257 isParatext "false" @default.
- W2141245257 isRetracted "false" @default.
- W2141245257 magId "2141245257" @default.
- W2141245257 workType "article" @default.