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- W2141429398 abstract "Abstract We report on the performance of a planetary multi-wafer reactor offering extremely high throughput due to the batch mode processing and a low cost of ownership. This reactor is combined with a liquid delivery system which mixes the liquid precursors from three different sources: 0.35 molar solutions of Ba(thd)2 and Sr(thd)2 and a 0.4 molar solution of Ti(O-iPr)2(thd)2. The composition and microstructure of the films were routinely investigated by X-ray diffraction and X-ray fluorescence analysis. As a direct consequence of the reactor design we obtain high efficiencies for the precursor incorporation in the order of 40%. Furthermore, we obtain a high uniformity of the films over 6 inch wafers. Details of the chemistry and microstructure were investigated by secondary neutral mass spectroscopy and scanning electron microscopy. The electrical film properties are discussed in relation to microstructural properties." @default.
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- W2141429398 date "2000-10-01" @default.
- W2141429398 modified "2023-09-27" @default.
- W2141429398 title "Deposition of thin BST films in a multi-wafer planetary reactor" @default.
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- W2141429398 doi "https://doi.org/10.1080/10584580008222267" @default.
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