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- W2141588046 abstract "This paper presents a comparison of two approaches to predict response variation of IC process. These are the direct approach using Monte Carlo process and device simulation and the use of DOE techniques to create response surfaces from which response distributions can be produced. The relative merits of these two approaches are discussed and it is demonstrated that provided a good fit is obtained for the response surface the agreement between the two methods is good." @default.
- W2141588046 created "2016-06-24" @default.
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- W2141588046 date "2002-11-19" @default.
- W2141588046 modified "2023-09-26" @default.
- W2141588046 title "A comparison of direct Monte-Carlo and DOE simulations for optimising IC processes" @default.
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- W2141588046 doi "https://doi.org/10.1109/icsict.1995.503369" @default.
- W2141588046 hasPublicationYear "2002" @default.
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